William N. Sterling - Santa Clara CA, US Lan Duong - Saratoga CA, US Gaku Furuta - Sunnyvale CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
C23C 16/00 H01L 21/683 H01T 23/00
US Classification:
118728, 361234
Abstract:
A method and apparatus for reducing arcing in a plasma processing system when processing large area substrates which contain one or more holes. In one embodiment of the invention, a substrate support member includes an electrically insulating insert located beneath a hole in an insulating, large area substrate. The insulating insert is made of aluminum oxide, and is located within a hole in the support member such that the insert is disposed beneath a hole in a glass substrate. The substrate support member is made of aluminum with an anodized surface.
Lan Duong - Saratoga CA, US William N. Sterling - Santa Clara CA, US John M. White - Hayward CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
B05C 13/00
US Classification:
118500, 118728, 15634551, 29464, 269289 R
Abstract:
The present invention generally includes a shadow frame with alignment inserts that may permit the shadow frame to be properly aligned on the susceptor. The shadow frame may have one or more alignment inserts. The alignment inserts may be coupled to a cavity formed in the bottom surface of the shadow frame. The alignment inserts may be shaped to receive an alignment button that may be present on the susceptor. Thus, as the susceptor raises to the processing position and retrieves the shadow frame, the shadow frame may align properly on the susceptor.
Name / Title
Company / Classification
Phones & Addresses
Lan Duong
Reel Time Inc Modelling Agencies
725 1155 W Pender St, Vancouver, BC V6E 2P4 6048016422, 6048016423
Lan Trong Duong President
DL PROSPECT, INC
19430 De Havilland Ct, Saratoga, CA 95070
Lan Duong Principal
Togo S Sandwiches Whol Groceries
19430 De Havilland Ct, Saratoga, CA 95070
Lan Duong
Reel Time Inc Modelling Agencies
6048016422, 6048016423
Lan Trong Duong President
SYNERGY ENTERPRISE GROUP, INC
19430 De Hanilland Ct, Saratoga, CA 95070 19430 De Havilland Ct, Saratoga, CA 95070
Lan Duong Director Information Technology
Sunlight Travel Travel Agency
2569 S King Rd, San Jose, CA 95122 PO Box 3530, Santa Clara, CA 95055