Larry Edwin Ellison

US Patent:

7425093, Sep 16, 2008

Filed:

Jul 13, 2004

Appl. No.:

10/890378

Inventors:

Zhiguo Zhang - Columbus OH, US
Larry Edwin Ellison - Wellston OH, US
Mikhail Y. Kachalov - Virginia Beach VA, US

Assignee:

Cabot Corporation - Boston MA

International Classification:

G01B 11/02
G01N 25/00
G01N 25/72
G01N 3/00
G01J 5/00

US Classification:

374 5, 374120, 374130, 374 57, 3563992

Abstract:

A method and apparatus for thermographically evaluating the bond integrity of a sputtering target assembly is described. The method includes applying a heating or cooling medium or energy to one surface of the assembly and acquiring a graphic recording of a corresponding temperature change on the opposing surface of the assembly using an imaging device. Also described is a method of mathematically analyzing the pixel data recorded in each frame to produce an integrated normalized temperature map that represents the bond integrity of the assembly.

US Patent:

20060268284, Nov 30, 2006

Filed:

Mar 1, 2006

Appl. No.:

11/365758

Inventors:

Zhiguo Zhang - Powell OH, US
Charles Wickersham - Columbus OH, US
Larry Ellison - Wellston OH, US

International Classification:

G01B 11/30
G01B 21/30

US Classification:

356600000, 073105000

Abstract:

A non-contact system and method for measuring an article surface, like a surface (or portion thereof) of a sputtering target assembly, are provided. For instance, the method includes scanning a surface with a sensing beam, and measuring the distance traveled by the sensing beam reflected from the surface, to a sensing device. The system can include a sensing device for collecting surface data at a plurality of points on the surface, and an analyzing device for analyzing the collected data.