Laura J Rothman

US Patent:

7108001, Sep 19, 2006

Filed:

Apr 5, 2004

Appl. No.:

10/818548

Inventors:

Keith Pope - Bedford NH, US
David J Mount - North Andover MA, US
Laura Rothman - South Kent CT, US
Rick C White - Nashua NH, US
Clifton Busby - Georges Mills NH, US
Stephen B Douglas - Boxborough MA, US

International Classification:

B08B 3/04
B08B 7/04

US Classification:

134141, 134 33, 134 37, 134149, 134157, 134200, 134902

Abstract:

A supercritical fluid cleaning system uses process fluid for operating rotary motors in the chamber with fluid bearings and fluid load levitation for rotating workpieces and impellers. Rotating speed and direction sensors and a home position locator facilitate motor control. Impellers add further agitation of the fluid in the chamber, faster processing, and greater uniformity of supercritical fluid components and increase mass transfer of fluid to the processed surface. Centrifugal operated clips and cassettes hold wafers and impellers. Non-contact, fluid operated rotating mechanisms reduce contamination. Physical, rotational, and shear affects are enhanced through centrifugal forces which can induce the separation of films localized deposits or molecular products of the reaction from the surface. There is a concomitant agitation of fluid, and continuous angular acceleration imparted to the processed surface features.

US Patent:

20060029310, Feb 9, 2006

Filed:

Apr 5, 2005

Appl. No.:

11/098992

Inventors:

Rick White - Nashua NH, US
Keith Pope - Merrimack NH, US
David Mount - Andover MA, US
Laura Rothman - South Kent CT, US
Clifton Busby - Georges Mills NH, US
Raymond Dow - Amherst NH, US

Assignee:

S.C. FLUIDS, INC. - Nashua NH

International Classification:

F16C 32/06

US Classification:

384100000

Abstract:

Device for fluidic support and bi-directional rotation of an item in a process chamber where the operating fluid is compatible with the process. The device has a rotable load bearing platform with a load bearing interface between it and a base in the chamber. Fluid, which may be supercritical fluid, is applied through load bearing ports into the interface to fluidly support the weight and create rotational forces on the load platform. A turbine on the load platform is actuated by fluid flow directed from turbine ports in the chamber connected to the fluid source. Markers on the load platform and sensors in the chamber provide speed and direction sensing. An electromagnetic source in the chamber reacts with a permanent magnet in the rotable platform to provide an electromagnetic force for moving, or changing or holding the relative position of the load platform.