Lihong Cao

US Patent:

20140177792, Jun 26, 2014

Filed:

Dec 21, 2012

Appl. No.:

13/724953

Inventors:

- Sunnyvale CA, US
Victoria Jean Bruce - Austin TX, US
Lihong Cao - Austin TX, US

Assignee:

ADVANCED MICRO DEVICES, INC. - Sunnyvale CA

International Classification:

G01N 23/00
H01J 35/04

US Classification:

378 41, 378124

Abstract:

Imaging methods, apparatus and systems are provided for using different irradiation frequencies to generate a composite three-dimensional image. One exemplary method for imaging a semiconductor device involves irradiating the semiconductor device with a first frequency of electromagnetic radiation, obtaining a first radiation response from the semiconductor device in response to the first frequency of electromagnetic radiation, irradiating the semiconductor device with a second frequency of electromagnetic radiation, obtaining a second radiation response from the semiconductor device in response to the second frequency of electromagnetic radiation, and generating a composite image of the semiconductor device based at least in part on the first radiation response and the second radiation response.