Lonna D Edwards

US Patent:

20160118265, Apr 28, 2016

Filed:

Jan 6, 2016

Appl. No.:

14/988895

Inventors:

- Urbana IL, US
Kaiyuan Wang - Atlanta GA, US
Chris Edwards - Chandler AZ, US
Lonna Edwards - Louisville KY, US
Xin Yu - Urbana IL, US
Gang Logan Liu - Champaign IL, US
Samuel Washington - Urbana IL, US
Shailendra Srivastava - Urbana IL, US
Terry Koker - Gibson City IL, US
Julianne Lee - Savoy IL, US
Catherine Britt Carlson - Saint Joseph IL, US

International Classification:

H01L 21/306
H01L 31/0236
H01L 21/768
H01L 31/0232

Abstract:

Methods and apparatus for subtractively fabricating three-dimensional structures relative to a surface of a substrate and for additively depositing metal and dopant atoms onto the surface and for diffusing them into the bulk. A chemical solution is applied to the surface of the semiconductor substrate, and a spatial pattern of electron-hole pairs is generated by projecting a spatial pattern of illumination characterized by a specified intensity, wavelength and duration at each pixel of a plurality of pixels on the surface. An electrical potential is applied across the interface of the semiconductor and the solution with a specified temporal profile relative to the temporal profile of the spatial pattern of illumination. Such methods are applied to the fabrication of a photodetector integral with a parabolic reflector, cell size sorting chips, a three-dimensional photonic bandgap chip, a photonic integrated circuit, and an integrated photonic microfluidic circuit.