Intel Corporation
Principal Engineer and Engineering Manager at Intel Corp
Education:
University of California, Davis 2003 - 2007
Doctorates, Doctor of Philosophy
University of Science and Technology of China 1999 - 2003
Bachelors, Bachelor of Science
Skills:
Engineering Chemical Engineering Process Engineering Energy Process Control Aspen Hysys Instrumentation Project Engineering Sustainability Hazop Mechanical Engineering Continuous Improvement Electrical Engineering Petrochemical P&Id Epc Feed Process Safety Management Gas Renewable Energy Calculations Refinery Commissioning Piping Process Simulation
Dual height glass is described for doping a fin of a field effect transistor structure in an integrated circuit. In one example, a method includes applying a glass layer over a fin of a FinFET structure, the fin having a source/drain region and a gate region, applying a polysilicon layer over the gate region, removing a portion of the glass layer from the source/drain region after applying the polysilicon, and thermally annealing the glass to drive dopants into the fin, and applying an epitaxial layer over the source/drain region.