Lucia Chen Markert

US Patent:

54784352, Dec 26, 1995

Filed:

Dec 16, 1994

Appl. No.:

8/356987

Inventors:

James J. Murphy - Austin TX
Janos Farkas - Austin TX
Lucia C. Markert - Austin TX
Rahul Jairath - Austin TX

Assignee:

National Semiconductor Corp. - Santa Clara CA
Sematech Inc. - Austin TX
AT&T GIS - Dayton OH

International Classification:

H01L 7100

US Classification:

1566361

Abstract:

A point of use slurry dispensing system with controls for dilution, temperature and oxidizer/etchant/additive infusion. A slurry in unmixed form and a diluting agent are independently pumped to a pad on a CMP tool. Liquid heaters are used to heat the slurry and the diluting agent to a desirable temperature. The actual mixing occurs at the point of use on the pad or in a dispensing line just prior to the point of use. In some instances a third independent distribution line is used to dispense an oxidizer, etchant and/or chemical additive at or near the point of use.