Mark Allen Cunningham

US Patent:

7637007, Dec 29, 2009

Filed:

Feb 7, 2007

Appl. No.:

11/704050

Inventors:

Bahadir Tunaboylu - Chandler AZ, US
Horst Clauberg - Warminster PA, US
Mark Cunningham - Queen Creek AZ, US
John McGlory - Chandler AZ, US

Assignee:

SV Probe Pte. Ltd. - Singapore

International Classification:

H01K 3/02
B23P 6/00
H01L 21/76

US Classification:

29846, 29847, 29842, 29844, 29874, 29882, 324754

Abstract:

An approach for fabricating cantilever probes for a probe card assembly includes forming posts on conductive traces on a substrate. A beam panel having beam elements formed therein is aligned to the substrate so that the beam elements are in contact with the plurality of posts. Each beam element is in contact with a post at a portion of the beam element so that both a first end portion and a second end portion overhang the post element. Each beam element is also attached to the beam panel by the first end portion. The beam elements are bonded to the plurality of posts. The first end portion of each beam element is cut, for example using an electrode, laser ablation or by dicing, to release the beam element from the beam panel. The beam panel is then removed, leaving the beam elements attached to the posts.

US Patent:

8299394, Oct 30, 2012

Filed:

Jun 15, 2007

Appl. No.:

11/818851

Inventors:

Peter J. Klaerner - Gilbert AZ, US
Jason Bradach - Phoenix AZ, US
Mark Cunningham - Queen Creek AZ, US
Bahadir Tunaboylu - Chandler AZ, US

Assignee:

SV Probe Pte Ltd. - Singapore

International Classification:

B23K 26/00

US Classification:

21912164, 21912163, 21912167, 21912169

Abstract:

An approach for assembling and repairing probe assemblies using laser welding includes aligning a beam element to a post element on a probe substrate. The beam element is positioned in contact with the post element on the probe substrate. The beam element is then attached to the post element on the probe substrate by laser welding the beam element to the post element on the probe substrate. The approach may include the use of a vacuum capillary pickup tool to align and position the beam element. The vacuum capillary pickup tool may also operate in conjunction with a laser beam delivery system for guiding the laser beam to the correct location for welding and also to assist in removing gases and debris attributable to the laser welding process. The approach allows probe elements to be connected directly to a probe substrate without requiring an intermediate layer.