Mark E Pendleton

US Patent:

20150241862, Aug 27, 2015

Filed:

May 8, 2015

Appl. No.:

14/708022

Inventors:

- Kitchener, CA
Mark T. Pendleton - San Diego CA, US
Charles M. Baylis - Cincinnati OH, US

International Classification:

G05B 19/042
H04L 29/06
H04L 29/08

Abstract:

A method is provided, including: establishing a session over the Internet with a client device, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB); receiving a request from the client device to access an equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool; receiving data from a controller of the manufacturing tool that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.

US Patent:

20140088749, Mar 27, 2014

Filed:

Nov 26, 2013

Appl. No.:

14/091317

Inventors:

- Kitchener, CA
Mark T. Pendleton - San Diego CA, US
Charles M. Baylis - Cincinnati OH, US

Assignee:

PEER INTELLECTUAL PROPERTY INC. - Kitchener

International Classification:

G05B 19/042
H04L 29/06

US Classification:

700117, 726 19

Abstract:

A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.