Mark T Pendleton

US Patent:

7403984, Jul 22, 2008

Filed:

Jul 5, 2001

Appl. No.:

09/899833

Inventors:

Raymond Walter Ellis - Austin TX, US
Mark Theodore Pendleton - San Diego CA, US
Charles Merritt Baylis - Cincinnati OH, US

Assignee:

Asyst Technologies, Inc. - Fremont CA

International Classification:

G06F 15/16

US Classification:

709223, 709224, 709228, 709227, 370230, 370466

Abstract:

A system, computer program product and method for automated tool management in a multi-protocol environment. A user may issue a message in accordance with an object-oriented interapplication communication protocol to a corresponding application interface unit. The message may be a request to perform a particular action on a selected tool. The content of the message may be extracted by the corresponding application interface unit which may comprise data required by the requested action and a pointer to the object representing the tool. The application interface unit may invoke a method of the object pointed to by the pointers in the message. A value may then be procured by an equipment model where the value may be associated with particular information requested in the message about a tool or a notification informing the user that an event occurred. The equipment model may transfer the value to the appropriate user.

US Patent:

7756963, Jul 13, 2010

Filed:

Oct 11, 2007

Appl. No.:

11/871118

Inventors:

Raymond Walter Ellis - Austin TX, US
Mark Theodore Pendleton - San Diego CA, US
Charles Merritt Baylis - Cincinnati OH, US

Assignee:

PEER Intellectual Property, Inc. - Kitchener, Ontario

International Classification:

G06F 15/16

US Classification:

709223, 709224, 709204, 709217, 709203, 709227, 709228, 370230, 370466, 710105

Abstract:

A system, computer program product and method for automated tool management in a multi-protocol environment. A user may issue a message in accordance with an object-oriented interapplication communication protocol to a corresponding application interface unit. The message may be a request to perform a particular action on a selected tool. The content of the message may be extracted by the corresponding application interface unit which may comprise data required by the requested action and a pointer to the object representing the tool. The application interface unit may invoke a method of the object pointed to by the pointers in the message. A value may then be procured by an equipment model where the value may be associated with particular information requested in the message about a tool or a notification informing the user that an event occurred. The equipment model may transfer the value to the appropriate user.

US Patent:

8028049, Sep 27, 2011

Filed:

Feb 1, 2000

Appl. No.:

09/496009

Inventors:

Raymond Walter Ellis - Austin TX, US
Mark Theodore Pendleton - San Diego CA, US
Charles Merritt Baylis - Cincinnati OH, US

Assignee:

PEER Intellectual Property Inc. - Kitchener, Ontario

International Classification:

G06F 15/173

US Classification:

709223, 700108, 700116, 700121, 700169, 703 20

Abstract:

A method and apparatus for web-based tool management are implemented. A tool object model provides a logical representation of the physical tool. The tool object model defines a hierarchical set of tool objects that characterize the tool, and additionally a set of method for performing actions on the tool objects. These actions also correspond to operations, which may include reporting as well as processing tasks, performed by the tool. A user may remotely control and monitor a tool using a conventional web browser. For example, a user may execute methods of the tool object model, or obtain detailed information about a tool object. User actions are passed to a server by embedding them in hypertext transfer protocol (HTTP) requests. The server receives the HTTP request, and passes the request to a corresponding page server in accordance with the action requested. Depending on the action requested, the page server may generate a web page in response, or may invoke a method of the tool object model.

US Patent:

20150241862, Aug 27, 2015

Filed:

May 8, 2015

Appl. No.:

14/708022

Inventors:

- Kitchener, CA
Mark T. Pendleton - San Diego CA, US
Charles M. Baylis - Cincinnati OH, US

International Classification:

G05B 19/042
H04L 29/06
H04L 29/08

Abstract:

A method is provided, including: establishing a session over the Internet with a client device, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB); receiving a request from the client device to access an equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool; receiving data from a controller of the manufacturing tool that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.

US Patent:

20140088749, Mar 27, 2014

Filed:

Nov 26, 2013

Appl. No.:

14/091317

Inventors:

- Kitchener, CA
Mark T. Pendleton - San Diego CA, US
Charles M. Baylis - Cincinnati OH, US

Assignee:

PEER INTELLECTUAL PROPERTY INC. - Kitchener

International Classification:

G05B 19/042
H04L 29/06

US Classification:

700117, 726 19

Abstract:

A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.