Mark Douglas Saunders

US Patent:

7361913, Apr 22, 2008

Filed:

Sep 30, 2005

Appl. No.:

11/241894

Inventors:

Russell J. Low - Rowley MA, US
Joseph C. Olson - Beverly MA, US
David R. Timberlake - Marblehead MA, US
James R. McLane - Beverly MA, US
Mark D. Saunders - Rockport MA, US
James J. Cummings - Wilmington MA, US
Thomas B. Callahan - Gloucester MA, US
Jonathan England - Broadbridge Heath Horsham, GB

Assignee:

Varian Semiconductor Equipment Associates, Inc. - Gloucester MA

International Classification:

G21K 5/10
H01J 37/08

US Classification:

25049221, 2504923, 250397, 2504921, 25049222, 2504922, 438961, 438514, 438 14, 31511181

Abstract:

An ion implanter includes a source of a stationary, planar ion beam, a set of beamline components that steer the ion beam along a normal beam path as determined by first operating parameter values, an end station that mechanically scans the wafer across the normal beam path, and control circuitry that responds to a glitch in the ion beam during implantation pass to (1) immediately alter an operating parameter of at least one of the beamline components to a second value to direct the ion beam away from the normal beam path and thereby cease implantation at an implantation transition location on the wafer, (2) subsequently move the wafer to an implantation-resuming position in which the implantation transition location on the wafer lies directly on the normal path of the ion beam, and (3) return the operating parameter to its first value to direct the ion beam along the normal beam path and resume ion implantation at the implantation transition location on the wafer. The operating parameter may be an output voltage of an extraction power supply, or other voltages and/or currents of beamline components that affect the path of the ion beam.

US Patent:

62537326, Jul 3, 2001

Filed:

Nov 11, 1999

Appl. No.:

9/438161

Inventors:

Mark Warner Semeyn - Ypsilanti MI
Joseph John LaRussa - Dearborn MI
Mark Alan Saunders - Saline MI

Assignee:

Ford Global Technologies, Inc. - Dearborn MI

International Classification:

F02D 910

US Classification:

123396

Abstract:

An electronic throttle control system having a housing 22 with a motor 40, throttle valve 60, gear mechanism 100, and failsafe mechanism. The failsafe mechanism comprises two springs 130, 150 and two levers 140, 160 which are used in combination with a gear member and an adjustable stop screw 170 on the housing.

US Patent:

62864815, Sep 11, 2001

Filed:

Nov 11, 1999

Appl. No.:

9/438162

Inventors:

Edward Albert Bos - Ann Arbor MI
Mark Alan Saunders - Saline MI
Mark Warner Semeyn - Ypsilanti MI

Assignee:

Ford Global Technologies, Inc. - Dearborn MI

International Classification:

F02D 100

US Classification:

123399

Abstract:

An electronic throttle control system having a housing 22 with a motor 40, throttle valve 60, gear mechanism 100, and failsafe mechanism. A main spring member 130 positioned between the housing 22 and a gear mechanism 104, which in turn is attached to the throttle valve shaft 62, biases the throttle plate 60 towards the closed position. A spring-biased default mechanism 132, 134 biases the throttle plate 60 from its closed position to a default or "limp-home" position.