Pellicles of p-xylylene polymer of non-uniform thickness are prepared between a plurality of mold plates having planar or contoured mold surfaces by positioning the mold surfaces apart with respect to each other so as to form a passage therebetween, and, while providing a pattern of non-uniform pressure between, and/or temperature on, the mold surfaces, directing a stream of vapors of p-xylylene monomer through such passage so as to cause the monomer to condense and polymerize on the mold surfaces in a non-uniform manner in response to such pattern of pressure and/or temperature. The mold plates are held stationary, and/or are rotated, in the vapor condensation zone, during the pellicle forming operation.