Mark Anthony Wright

US Patent:

7417733, Aug 26, 2008

Filed:

Feb 8, 2006

Appl. No.:

11/350999

Inventors:

Mark Wright - Meridian ID, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

G01N 21/00

US Classification:

356337, 356336

Abstract:

Broadly speaking, the embodiments of the present invention fill the need by providing an improved chamber particle source identification mechanism. The in-situ chamber particle source identification method and apparatus can greatly shorten the time it takes to identify chamber particle source, which could improve the chamber throughput for production system. The method and apparatus can also be used to test components for particle performance during chamber engineering development stage. In one embodiment, an in-situ chamber particle monitor assembly for a semiconductor processing chamber includes at least one laser light source. The at least one laser light source can scan laser light in a chamber process volume within the processing chamber. The in-situ chamber particle monitor assembly also includes at least one laser light collector. The at least one laser light collector can collect laser light emitted from the at least one laser light source.

US Patent:

7626699, Dec 1, 2009

Filed:

Jul 17, 2008

Appl. No.:

12/175380

Inventors:

Mark Wright - Meridian ID, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

G01N 21/00

US Classification:

356337, 356343

Abstract:

Embodiments of the present invention provide an apparatus and a method for chamber particle source identification. The chamber particle source identification method and apparatus can greatly shorten the time it takes to identify chamber particle source(s). In one embodiment, a chamber particle monitor assembly for a processing chamber is provided. The chamber particle monitor assembly includes at least one laser light source, which can scan laser light in a chamber process volume within the processing chamber. The chamber particle monitor assembly also includes a plurality of laser light collectors, which can collect laser light emitted from the at least one laser light source continuously to monitor particle performance within the processing chamber. The plurality of laser light collectors are placed in the processing chamber such that none of the plurality of laser light collectors share a common axis. The chamber particle monitor assembly further includes an analyzer that analyzes signals representing the laser light collected by the plurality of laser light collectors to provide chamber particle information.