Martin W Elliott

US Patent:

7077264, Jul 18, 2006

Filed:

Jan 26, 2004

Appl. No.:

10/764982

Inventors:

Michael R. Rice - Pleasanton CA, US
Robert B. Lowrance - Los Gatos CA, US
Martin R. Elliott - Round Rock TX, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric A. Englhardt - Palo Alto CA, US

Assignee:

Applied Material, Inc. - Santa Clara CA

International Classification:

B65G 17/02

US Classification:

198846, 1988441, 414935

Abstract:

According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

US Patent:

7156221, Jan 2, 2007

Filed:

Nov 12, 2004

Appl. No.:

10/987955

Inventors:

Michael R. Rice - Pleasanton CA, US
Eric A. Englhardt - Palo Alto CA, US
Robert B. Lowrance - Los Gatos CA, US
Martin R. Elliott - Round Rock TX, US
Jeffrey C. Hudgens - San Francisco CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65G 29/00

US Classification:

1984654, 1984751, 198680

Abstract:

A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

US Patent:

7168553, Jan 30, 2007

Filed:

Nov 12, 2004

Appl. No.:

10/988190

Inventors:

Michael R. Rice - Pleasanton CA, US
Eric A. Englhardt - Palo Alto CA, US
Robert B. Lowrance - Los Gatos CA, US
Martin R. Elliott - Round Rock TX, US
Jeffrey C. Hudgens - San Francisco CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65G 29/00

US Classification:

1984689, 19846801, 1984686

Abstract:

In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.

US Patent:

7221993, May 22, 2007

Filed:

Jan 26, 2004

Appl. No.:

10/764620

Inventors:

Michael R. Rice - Pleasanton CA, US
Eric A. Englhardt - Palo Alto CA, US
Vinay Shah - San Francisco CA, US
Martin R. Elliott - Round Rock TX, US
Robert B. Lowrance - Los Gatos CA, US
Jeffrey C. Hudgens - San Francisco CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700112, 700101, 700108, 700111, 700121

Abstract:

In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size semiconductor device manufacturing facility having (1) a plurality of processing tools; and (2) a high speed transport system adapted to transport small lot size substrate carriers among the processing tools. The method further includes maintaining a predetermined work in progress level within the small lot size semiconductor device manufacturing facility by (1) increasing an average cycle time of low priority substrates within the small lot size semiconductor device manufacturing facility; and (2) decreasing an average cycle time of high priority substrates within the small lot size semiconductor device manufacturing facility so as to approximately maintain the predetermined work in progress level within the small lot size semiconductor device manufacturing facility. Numerous other aspects are provided.

US Patent:

7230702, Jun 12, 2007

Filed:

Nov 12, 2004

Appl. No.:

10/987950

Inventors:

Michael R. Rice - Pleasanton CA, US
Eric A. Englhardt - Palo Alto CA, US
Robert B. Lowrance - Los Gatos CA, US
Martin R. Elliott - Round Rock TX, US
Jeffrey C. Hudgens - San Francisco CA, US
Kirk Van Katwyk - Tracy CA, US
Amitabh Puri - San Jose CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G01B 11/00
H01L 21/677
B65B 21/02

US Classification:

356400, 414217, 414811

Abstract:

A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.

US Patent:

7234584, Jun 26, 2007

Filed:

Aug 28, 2003

Appl. No.:

10/650310

Inventors:

Michael Robert Rice - Pleasanton CA, US
Robert B. Lowrance - Los Gatos CA, US
Martin R. Elliott - Round Rock TX, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric A. Englhardt - Palo Alto CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65G 29/00

US Classification:

1984651, 1984654, 1983463

Abstract:

In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

US Patent:

7243003, Jul 10, 2007

Filed:

Aug 28, 2003

Appl. No.:

10/650480

Inventors:

Michael Robert Rice - Pleasanton CA, US
Martin R. Elliott - Round Rock TX, US
Robert B. Lowrance - Los Gatos CA, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric Andrew Englhardt - Palo Alto CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700245, 414217, 414219, 414249, 451 5

Abstract:

In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

US Patent:

7293642, Nov 13, 2007

Filed:

Jun 27, 2006

Appl. No.:

11/476994

Inventors:

Michael R. Rice - Pleasanton CA, US
Robert B. Lowrance - Los Gatos CA, US
Martin R. Elliott - Round Rock TX, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric A. Englhardt - Palo Alto CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65G 17/02

US Classification:

198846, 1988441, 414935

Abstract:

According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.