Matthew Antoniou

US Patent:

8240160, Aug 14, 2012

Filed:

Mar 25, 2009

Appl. No.:

12/410580

Inventors:

Kenneth W. Cowans - Fullerton CA, US
Matthew Antoniou - Lake Forest CA, US
Glenn Zubillaga - Canyon Lake CA, US
William W. Cowans - Fullerton CA, US

Assignee:

BE Aerospace, Inc. - Wellington FL

International Classification:

F25B 41/00
F25B 49/00
F25B 1/00

US Classification:

621964, 62222, 62224

Abstract:

In a thermal control system of the type employing a two phase refrigerant that is first compressed and then is divided into a variable mass flow of refrigerant into a hot pressurized gas form and a differential remainder flow of cooled vapor derived from condensation and then thermal expansion, transitions between different temperature levels are enhanced by incremental variations of the mass flow at different control rates.

US Patent:

20040035851, Feb 26, 2004

Filed:

May 16, 2003

Appl. No.:

10/439299

Inventors:

Matthew Antoniou - Lake Forest CA, US
Bryan Christofferson - Orange CA, US

International Classification:

H05B001/02

US Classification:

219/509000

Abstract:

A system and method for controlling a critical process variable, such as the temperature of one or more temperature control units for cluster tools in a semiconductor fabrication facility, uses dual interrelated PR) algorithms for interrelated but at times separate control of heating capabilities. The temperature control units operate with high power efficiency, because no heating energy is expended during cooling and non-transition modes. When approaching a temperature threshold, however, the heating algorithm is reinstated just long enough to provide minimum undershoot and enabling precise, low per consuming, steady state control at 0.1 C., minimizing undershoot and enabling precise steady state control at 0.1 C.