Matthew L Hendrickson

US Patent:

6338982, Jan 15, 2002

Filed:

Oct 16, 2000

Appl. No.:

09/688397

Inventors:

Masud Beroz - Milpitas CA
Thomas H. DiStefano - Monte Sereno CA
Matthew T. Hendrickson - San Jose CA
David Light - Los Gatos CA
John W. Smith - Palo Alto CA

Assignee:

Tessera, Inc. - San Jose CA

International Classification:

H01L 2102

US Classification:

438116, 438118, 269909

Abstract:

A flexible sheet used in manufacture of microelectronic components is held on a frame formed from a rigid material so that the frame maintains the sheet under tension during processing and thereby stabilizes the dimensions of the sheet. The frame may be formed from a rigid, light-transmissive material such as a glass, and the bond between the frame and sheet may be made or released by light transmitted through the frame. Preferred features of the framed sheet minimize entrapment of processing liquids such as etch solutions, thereby minimizing carryover of processing solutions between steps. The frame may have contact openings which permit engagement of a metallic layer on the sheet by an electrode carrying electroplating or etching current without disturbing the main portion of the sheet where features are to be formed or treated.

US Patent:

7152311, Dec 26, 2006

Filed:

Dec 26, 2001

Appl. No.:

10/032886

Inventors:

Masud Beroz - Milpitas CA, US
Thomas H. DiStefano - Monte Sereno CA, US
Matthew T. Hendrickson - San Jose CA, US
David Light - Los Gatos CA, US
John W. Smith - Palo Alto CA, US

Assignee:

Tessera, Inc. - San Jose CA

International Classification:

B23P 19/04

US Classification:

29760, 29799, 269909

Abstract:

A flexible sheet used in manufacture of microelectronic components is held on a frame formed from a rigid material so that the frame maintains the sheet under tension during processing and thereby stabilizes the dimensions of the sheet. The frame may be formed from a rigid, light-transmissive material such as a glass, and the bond between the frame and sheet may be made or released by light transmitted through the frame. Preferred features of the framed sheet minimize entrapment of processing liquids such as etch solutions, thereby minimizing carryover of processing solutions between steps. The frame may have contact openings which permit engagement of a metallic layer on the sheet by an electrode carrying electroplating or etching current without disturbing the main portion of the sheet where features are to be formed or treated.

US Patent:

8171949, May 8, 2012

Filed:

Mar 6, 2009

Appl. No.:

12/399868

Inventors:

Rhownica Lund - Fremont CA, US
Andreas Parks - San Jose CA, US
Matthew Hendrickson - Saratoga CA, US

Assignee:

WD Media, Inc. - San Jose CA

International Classification:

F15C 4/00
F15C 1/00

US Classification:

137 13, 137312, 137561 R, 22056003, 220571

Abstract:

A fluid flow method and apparatus are described. The apparatus includes a trough coupled between tanks to provide an air flow down between the tanks.

US Patent:

62179721, Apr 17, 2001

Filed:

Oct 16, 1998

Appl. No.:

9/173797

Inventors:

Masud Beroz - Milpitas CA
Thomas H. DiStefano - Monte Sereno CA
Matthew T. Hendrickson - San Jose CA
David Light - Los Gatos CA
John W. Smith - Palo Alto CA

Assignee:

Tessera, Inc. - San Jose CA

International Classification:

B32B 104
H01L 2102

US Classification:

428 68

Abstract:

A flexible sheet used in manufacture of microelectronic components is held on a frame formed from a rigid material so that the frame maintains the sheet under tension during processing and thereby stabilizes the dimensions of the sheet. The frame may be formed from a rigid, light-transmissive material such as a glass, and the bond between the frame and sheet may be made or released by light transmitted through the frame. Preferred features of the framed sheet minimize entrapment of processing liquids such as etch solutions, thereby minimizing carryover of processing solutions between steps. The frame may have contact openings which permit engagement of a metallic layer on the sheet by an electrode carrying electroplating or etching current without disturbing the main portion of the sheet where features are to be formed or treated.