A novel dual beam low energy electron microscope (LEEM) apparatus for inspecting semiconductor circuits or masks. Direct imaging records many pixels in parallel, offering higher inspection rates than prior art scanning methods. A low energy flood beam is superimposed with a second, higher energy flood beam. The use of two beams avoids charging effects upon insulating or partially insulating substrates. Under appropriate conditions, the net charging flux to each image element can be balanced on a pixel by pixel, as well as global basis. Either the low energy or the higher energy beam may be used to form an image of the surface. An electron optical apparatus and configuration for this dual beam LEEM is described.
Photoelectron Emission Microscope For Wafer And Reticle Inspection
David Adler - San Jose CA, US Matthew Marcus - Berkeley CA, US
Assignee:
KLA-Tencor Technologies Corporation - Milpitas CA
International Classification:
G01N023/227
US Classification:
250307, 250306
Abstract:
A method of inspecting and imaging substrates with an electron beam. The method can include a illuminating the substrate with a photon beam to cause photoemission of electrons. A low energy electron beam can be used to prevent or reduce positive charging of the substrate. Reflected electrons and/or emitted photoelectrons can be imaged to review or inspect the substrate.
Anthony Buonassisi - San Diego CA, US Matthias Heuer - Berkeley CA, US Andrei A. Istratov - Albany CA, US Matthew D. Pickett - Berkeley CA, US Matthew A. Marcus - Berkeley CA, US Eicke R. Weber - Piedmont CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
H01J 7/18
US Classification:
2521816
Abstract:
The present invention relates to the internal gettering of impurities in semiconductors by metal alloy clusters. In particular, intermetallic clusters are formed within silicon, such clusters containing two or more transition metal species. Such clusters have melting temperatures below that of the host material and are shown to be particularly effective in gettering impurities within the silicon and collecting them into isolated, less harmful locations. Novel compositions for some of the metal alloy clusters are also described.
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McPherson College 1999 - 2003
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Medical School SUNY Downstate Medical Center College of Medicine Graduated: 1999
Procedures:
Arthrocentesis Lumbar Puncture
Languages:
English
Description:
Dr. Marcus graduated from the SUNY Downstate Medical Center College of Medicine in 1999. He works in Columbia, SC and 1 other location and specializes in Diagnostic Radiology and Pediatric Radiology. Dr. Marcus is affiliated with Palmetto Health Richland Hospital, Providence Health and Providence Orthopedic Hospital.
Physical Medicine & Rehabilitation, Orthopedic Sports Medicine
Work:
University Of Illinois Chicago Sports Medicine 839 W Roosevelt Rd STE 102, Chicago, IL 60608 3123554404 (phone), 3124137337 (fax)
Education:
Medical School SUNY Downstate Medical Center College of Medicine Graduated: 2008
Languages:
English Spanish
Description:
Dr. Marcus graduated from the SUNY Downstate Medical Center College of Medicine in 2008. He works in Chicago, IL and specializes in Physical Medicine & Rehabilitation and Orthopedic Sports Medicine. Dr. Marcus is affiliated with University Of Illinois Hospital Health & Science Center.
ansas City, MO, are well known for their use of Google-Fibers gigabit Internet, which allows them to have a thriving tech start-up scene and attract new businesses to the area. Matthew Marcus is a co-found for the Kansas City Startup Village (KCSV) which uses Google Fiber and the super fast Internet. I