Matthew B Ross

US Patent:

6989227, Jan 24, 2006

Filed:

May 28, 2003

Appl. No.:

10/447729

Inventors:

Timothy Weidman - Sunnyvale CA, US
William R. Livesay - San Diego CA, US
Matthew F. Ross - San Diego CA, US

Assignee:

Applied Materials Inc. - Santa Clara CA

International Classification:

G03F 7/075
G03F 7/027
G03F 7/039
G03F 7/40
G03F 7/38

US Classification:

4302871, 4302811, 4302701, 430296, 4302861, 4302851, 430330, 430323

Abstract:

One embodiment of the present invention is a photoresist formulation that includes e-beam cross-linkable substituents, which substituents include one or more of the following functional groups: (a) carbon-carbon double bonds; (b) a strained ring system; (c) a halogenated compound; and (d) one or more organo-silicon moieties.

US Patent:

61771430, Jan 23, 2001

Filed:

Jan 6, 1999

Appl. No.:

9/226347

Inventors:

Carl Treadwell - Palo Alto CA
Jingjun Yang - Cupertino CA
Matthew Ross - San Diego CA

International Classification:

C08F 248
C08J 704
H01L 5140

US Classification:

427515

Abstract:

Electron beam cured siloxane dielectric films and to a process for their manufacture which are useful in the production of integrated circuits. A siloxane polymer having in one aspect less than 40 Mole percent carbon containing substituents, and in another aspect at least approximately 40 Mole percent carbon containing substituents is cured by a wide beam electron beam exposure.

US Patent:

20160237982, Aug 18, 2016

Filed:

Sep 4, 2014

Appl. No.:

14/916419

Inventors:

- San Anselmo CA, US
Matthew ROSS - San Francisco CA, US
Jayden HARMAN - Princeville HI, US

International Classification:

F03B 15/04
F03B 13/26
F03B 13/10
F03B 13/22

Abstract:

A water turbine drive system is described for generating rotational power from a flowing water stream. The water turbine drive system comprises a rotating machine driven by a water turbine disposed remote from the machine, where the machine and turbine are connected together by a tether member adapted to be rotated by the turbine and transmit the rotation and thereby drive the machine. The tether member permits positional movement of the turbine relative to the machine such that the rotational axis of the turbine need not be co-aligned with the rotational axis of a driven rotating member of the machine.