Michael D Camp

US Patent:

20130017315, Jan 17, 2013

Filed:

Jul 15, 2011

Appl. No.:

13/183921

Inventors:

CANFENG LAI - Fremont CA, US
DAVID EUGENE ABERLE - Milpitas CA, US
MICHAEL P. CAMP - San Ramon CA, US
HENRY BARANDICA - San Jose CA, US
MARTIN A. HILKENE - Gilroy CA, US
MATTHEW D. SCOTNEY-CASTLE - Morgan Hill CA, US
JEFFREY TOBIN - Mountain View CA, US
DOUGLAS H. BURNS - Saratoga CA, US
LARA HAWRYLCHAK - Gilroy CA, US
PETER I. PORSHNEV - Poway CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

C23C 16/505
C23C 16/52
H05H 1/46

US Classification:

427 8, 20429834, 20419233, 20429832, 118723 I, 118697

Abstract:

Methods and apparatus for controlling power distribution in a substrate processing system are provided. In some embodiments, a substrate processing system including a process chamber having a substrate support and a processing region disposed above the substrate support; a first conduit disposed above the processing region to provide a portion of a first toroidal path that extends through the first conduit and across the processing region; a second conduit disposed above the processing region to provide a portion of a second toroidal path that extends through the second conduit and across the processing region; an RF generator coupled to the first and second conduits to provide RF energy having a first frequency to each of the first and second conduits; an impedance matching network disposed between the RF generator and the first and second conduits; and a power divider to control the amount of RF energy provided to the first and second conduits from the RF generator.