Alan Janos - Darnestown MD, US Malcolm Pack - Frederick MD, US Michael B. Colson - Woodbine MD, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
H01J 61/30 H01J 17/16 H01J 9/24
US Classification:
313634, 313573, 313493, 445 26, 445 27
Abstract:
An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.
Method And System For Detection Of Solid Materials In A Plasma Using An Electromagnetic Circuit
Muhesh Vanodia - Germantown MD, US Michael B. Colson - Woodbine MD, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
G01N 27/00
US Classification:
422 98, 422 8201, 436149
Abstract:
A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
Method And System For Detection Of Solid Materials In A Plasma Using An Electromagnetic Circuit
A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.