Michael A Colson

US Patent:

6664737, Dec 16, 2003

Filed:

Jun 21, 2002

Appl. No.:

10/064219

Inventors:

Ivan Berry - Ellicott City MD
Alan C. Janos - Darnestown MD
Michael Bruce Colson - Woodbine MD

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

H01J 724

US Classification:

31511121, 315246, 15634547, 134 11

Abstract:

A dielectric barrier discharge apparatus for treating a substrate includes a first planar electrode; a dielectric layer disposed on a surface of the first planar electrode; a porous planar electrode spaced above and in a parallel plane with the dielectric layer, wherein the porous planar electrode has a geometric transmission factor greater than 70 percent; and a power supply in electrical communication with the first electrode and the second electrode. A process for treating a substrate includes exposing the substrate surface to reactants produced by the dielectric barrier discharge apparatus.

US Patent:

6796711, Sep 28, 2004

Filed:

Mar 29, 2002

Appl. No.:

10/113554

Inventors:

Michael Bruce Colson - Woodbine MD
Aseem Kumar Srivastava - Gaithersburg MD

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

G01K 706

US Classification:

374179, 374208, 374163, 374165, 136233

Abstract:

A contact measurement probe for measuring a temperature of a substrate in a process environment includes a probe head having a contact surface made of a ceramic material or a polymeric material for contacting the substrate. The contact measurement probe eliminates electrical biasing effects in process environments that include an ion source, thereby providing greater accuracy and reproducibility in temperature measurement.

US Patent:

7166963, Jan 23, 2007

Filed:

Sep 10, 2004

Appl. No.:

10/937947

Inventors:

Alan Janos - Darnestown MD, US
Malcolm Pack - Frederick MD, US
Michael B. Colson - Woodbine MD, US

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

H01J 61/30
H01J 17/16
H01J 9/24

US Classification:

313634, 313573, 313493, 445 26, 445 27

Abstract:

An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.

US Patent:

7338575, Mar 4, 2008

Filed:

Sep 10, 2004

Appl. No.:

10/937946

Inventors:

Michael Bruce Colson - Woodbine MD, US
Michael Silbert - Sykesville MD, US

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

C23C 16/00
C23F 1/00
H01L 21/306

US Classification:

15634541, 15634535, 15634536, 15634542, 15634546, 118723 MW, 118723 MR, 118723 MA, 118723 AN

Abstract:

A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0. 002 and a thermal efficiency coefficient greater than or equal to 1. 30 kJ/kg*K.

US Patent:

7794663, Sep 14, 2010

Filed:

Feb 19, 2004

Appl. No.:

10/708251

Inventors:

Muhesh Vanodia - Germantown MD, US
Michael B. Colson - Woodbine MD, US

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

G01N 27/00

US Classification:

422 98, 422 8201, 436149

Abstract:

A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.

US Patent:

8119413, Feb 21, 2012

Filed:

Jul 26, 2010

Appl. No.:

12/843175

Inventors:

Mahesh Vanodia - Germantown MD, US
Michael B. Colson - Woodbine MD, US

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

G01N 27/02

US Classification:

436149, 73 232, 7333503, 204155, 204554, 204556, 324263, 324600, 324 711

Abstract:

A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.

US Patent:

20130221166, Aug 29, 2013

Filed:

Feb 29, 2012

Appl. No.:

13/408355

Inventors:

Benjamin L. Henniges - Mt. Airy MD, US
Michael B. Colson - Woodbine MD, US
David A. Gloyd - Ellicott City MD, US
John E. Halowell - Montgomery Village MD, US

Assignee:

Wabtec Holding Corp. - Wilmerding PA

International Classification:

B61C 17/00

US Classification:

248 53

Abstract:

A rail car intercar cable arrangement, including: a rail car intercar cable having a first end comprising a first connection arrangement configured for attachment to a connection point of a rail car; and a second end comprising a second connection arrangement configured for attachment to a second end of another rail car intercar cable; and a hanger arrangement comprising at least one hanger member having a first end and a second end, wherein at least a portion of the first end of the hanger member is attached to at least a portion of the rail car intercar cable, such that the at least one hanger member is not directly attached to a portion of the rail car, and wherein the hanger member is configured to support the rail car intercar cable, thereby preventing the rail car intercar cable from contacting a ground surface.

US Patent:

20200122756, Apr 23, 2020

Filed:

Oct 18, 2018

Appl. No.:

16/164338

Inventors:

- Wilmerding PA, US
Benjamin L. Henniges - Mt. Airy MD, US
Michael B. Colson - Woodbine MD, US
Carl L. Haas - Walkersville MD, US
David Andrew Gloyd - Ellicott City MD, US

International Classification:

B61L 15/00

Abstract:

A device adapted for attachment to a coupler of a trailing railcar of a train includes an enclosure defining an internal compartment, a port adapted for connection to an air brake hose receiving air from a brake pipe of the train, a handle extending from the enclosure, a communication device disposed within the internal compartment of the enclosure, and at least one antenna connected to the communication device and extending at least partially through the internal compartment of the enclosure and into an internal cavity of the handle.

Address:

45055 Irvin St, Hollywood, MD 20636

Phone:

3018669376

VIN:

5GZCZ63467S850975

Make:

SATURN

Model:

VUE

Year:

2007