Michael T Colson

US Patent:

6664737, Dec 16, 2003

Filed:

Jun 21, 2002

Appl. No.:

10/064219

Inventors:

Ivan Berry - Ellicott City MD
Alan C. Janos - Darnestown MD
Michael Bruce Colson - Woodbine MD

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

H01J 724

US Classification:

31511121, 315246, 15634547, 134 11

Abstract:

A dielectric barrier discharge apparatus for treating a substrate includes a first planar electrode; a dielectric layer disposed on a surface of the first planar electrode; a porous planar electrode spaced above and in a parallel plane with the dielectric layer, wherein the porous planar electrode has a geometric transmission factor greater than 70 percent; and a power supply in electrical communication with the first electrode and the second electrode. A process for treating a substrate includes exposing the substrate surface to reactants produced by the dielectric barrier discharge apparatus.