Michael Ray Contreras

US Patent:

55565069, Sep 17, 1996

Filed:

Dec 18, 1995

Appl. No.:

8/573981

Inventors:

Michael A. Contreras - Austin TX
Robert E. Anderson - Cedar Park TX

Assignee:

Motorola, Inc. - Schaumburg IL

International Classification:

C23C 1400

US Classification:

1566251

Abstract:

In one embodiment a plasma ignitor (10) having a first dielectric housing (18), that encases a first portion of a first conductive lead (14) and a first portion of a second conductive lead (16), and end cap (30), that locks its filament (31) into position, is used to initiate a plasma within an etch chamber (64). The plasma is used to etch an integrated circuit substrate (62) and to form an etched surface (78). A conductive layer of material (80) is then deposited on the etched surface (78). The first dielectric housing (18) keeps the first portion of the first conductive lead (14) and the first portion of the second conductive lead (16) from shorting to one another during processing, and the end cap (30) prevents the filament (31) from falling off during processing. Thus, the present invention allows contact resistance to be repeatably minimized.