A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable reticle cassette is comprised of an inner chamber and an outer chamber. The system further includes an end effector coupled to a robotic arm. The end effector engages one of the plurality of reticles to enable the reticle to be positioned within the removable reticle cassette and thereafter transported. The system further includes a seal, coupled to the end effector and the robotic arm. To transport the reticle, the reticle is first loaded onto the end effector. Next, the end effector is used to create an arrangement wherein the reticle is loaded into the removable reticle cassette. Importantly, the reticle and removable reticle cassette do not come into contact with one another. The reticle and removable reticle cassette arrangement is then sealed and transported from the indexer to a mount for performing lithographic exposure.
Alfred F. DeCarlo - Stamford CT Michael DeMarco - Port Chester NY J. Larry Hineline - Fairfield CT
Assignee:
Joint Medical Products Corporation - Stamford CT
International Classification:
A61B 1716 A61B 1717
US Classification:
606 80
Abstract:
A surgical instrument 20 for machining a precise cavity in a patient's bone for receiving a prosthesis 13 having a conical portion 6 and a triangular portion 8 is provided. The instrument 20 includes a first member 26 which has (i) a conical portion 44 which defines a longitudinal axis 40 and (ii) a guide path 46, 76 for receiving a movable second member 24. The movable second member 24 carries a triangle cutter 22. The movable second member 24 is moved along the longitudinal axis 40 to cut bone until an appropriate index 30 on the movable second member 24 is aligned with a reference surface 28 on the first member 26. This alignment indicates that the triangular cavity formed by cutter 22 is of the appropriate size for the triangular portion 8 of the prosthesis 13 which is to be implanted.
Portland, OR Vancouver, BC Bangkok, Thailand Pomona, CA Claremont, CA Fremantle, Western Australia Ocean Bay Park, NY New Rochelle, NY San Pedro, CA San Diego, CA Dix Hills, NY Huntington, NY
Michael Demarco
Education:
Hunter College - History, Manhattan College - Computer Science