Michael G Flanigan

US Patent:

8021527, Sep 20, 2011

Filed:

Oct 25, 2007

Appl. No.:

11/924573

Inventors:

Keith A. Miller - Sunnyvale CA, US
Michael Allen Flanigan - Dutch Flat CA, US
Hari Ponnekanti - San Jose CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C25B 9/00
C25B 11/00
C25B 13/00
C23C 14/00

US Classification:

2042982, 20429822

Abstract:

A magnetron actuator for moving a magnetron in a nearly arbitrary radial and azimuthal path in the back of a target in a plasma sputter reactor. The magnetron includes two coaxial rotary shafts extending along the chamber central axis and coupled to two independently controllable rotary actuators. An epicyclic gear mechanism or a frog-leg structure mechanically couple the shafts to the magnetron to control its radial and azimuthal position. A vertical actuator moves the shafts vertically in tandem to vary the magnetron's separation from the target's back surface and compensate for erosion of the front surface. The rotary actuators may be separately coupled to the shafts or a rotatable ring gear may be coupled to the shafts through respectively fixed and orbiting idler gears. Two radially spaced sensors detect reflectors attached to the inner and outer arms of the epicyclic gear mechanism for homing of the controller.

US Patent:

20070102286, May 10, 2007

Filed:

Oct 27, 2006

Appl. No.:

11/553982

Inventors:

Kathleen Scheible - San Francisco CA, US
Michael Flanigan - Dutch Flat CA, US
Goichi Yoshidome - Emeryville CA, US
Adolph Allen - Oakland CA, US
Christopher Pavloff - San Francisco CA, US

International Classification:

C23C 14/00

US Classification:

204298010

Abstract:

A process kit comprises a ring assembly that is placed about a substrate support in a substrate processing chamber to reduce deposition of process deposits on the chamber components and on an overhang edge of the substrate. The process kit includes a deposition ring, cover ring, and anti-lift bracket, and can also include a unitary shield. A target is also described.

US Patent:

20110297538, Dec 8, 2011

Filed:

Aug 19, 2011

Appl. No.:

13/213367

Inventors:

Keith A. Miller - Sunnyvale CA, US
Michael Allen Flanigan - Dutch Flat CA, US
Hari Ponnekanti - San Jose CA, US

Assignee:

APPLIED MATERIAL;S, INC. - Santa Clara CA

International Classification:

C23C 14/35

US Classification:

20429816

Abstract:

A magnetron actuator for moving a magnetron in a nearly arbitrary radial and azimuthal path in the back of a target in a plasma sputter reactor. The magnetron includes two coaxial rotary shafts extending along the chamber central axis and coupled to two independently controllable rotary actuators. An epicyclic gear mechanism or a frog-leg structure mechanically couple the shafts to the magnetron to control its radial and azimuthal position. A vertical actuator moves the shafts vertically in tandem to vary the magnetron's separation from the target's back surface and compensate for erosion of the front surface. The rotary actuators may be separately coupled to the shafts or a rotatable ring gear may be coupled to the shafts through respectively fixed and orbiting idler gears. Two radially spaced sensors detect reflectors attached to the inner and outer arms of the epicyclic gear mechanism for homing of the controller.

US Patent:

58645950, Jan 26, 1999

Filed:

May 9, 1997

Appl. No.:

8/853280

Inventors:

Brian H. Burrows - Campbell CA
Neal J. Goldberg - Milpitas CA
Michael A. Flanigan - San Jose CA
Michael Y. Suekawa - San Jose CA

Assignee:

General Electric Company - Schnectady NY

International Classification:

G21C 1900

US Classification:

376260

Abstract:

An actuator for performing work in a nuclear reactor is described. In one embodiment, the actuator includes an x-axis linear slide assembly, a y-axis linear slide assembly, and a z-axis linear slide assembly. The x-axis linear slide assembly is mounted to a junction box, the y-axis linear slide assembly is mounted on a carriage of the x-axis assembly, and the z-axis linear slide assembly is mounted on a carriage of the y-axis assembly. The actuator also includes motor assemblies coupled to respective linear slide assemblies. Each motor assembly includes a motor and a resolver sealed in a leakproof can. Pulley-timing belt assemblies couple each motor to a respective lead screw. Specifically, a drive pulley is connected to a rotor shaft of each motor, and a lead screw pulley is secured to an end of each lead screw. Each pulley-timing belt assembly also includes an idler pulley, and a belt extends around the lead screw pulley, the idler pulley, and the drive pulley. The motor assemblies are mounted so that the axis of each motor is substantially parallel to the axis the respective lead screw.