Michael Duane Huston

US Patent:

6409463, Jun 25, 2002

Filed:

Feb 8, 2000

Appl. No.:

09/500399

Inventors:

Brett J. Croft - Vancouver WA
Michael Huston - Vancouver WA

Assignee:

SEH America, Inc. - Vancouver WA

International Classification:

B65G 4907

US Classification:

414936, 414754, 414783, 414941, 438973, 451 9

Abstract:

Apparatuses and methods for use in adjusting a substrate centering system to center a substrate on a rotatable chuck in a semiconductor processing machine, the chuck including at least one reference point. One apparatus comprises a plate configured to be placed on the chuck and at least one centering mark formed on the plate, wherein the at least one centering mark is configured so that it may be compared to the at least one reference point on the chuck to determine if the plate is centered. The plate often is at least partially transparent so that its position relative to the at least one reference point on the chuck may be seen.

US Patent:

7059943, Jun 13, 2006

Filed:

Jun 28, 2001

Appl. No.:

09/893928

Inventors:

Scott Cann - Washougal WA, US
Michael Huston - Vancouver WA, US
Sergey N. Altukhov - Vancouver WA, US

Assignee:

SEH America, Inc. - Vancouver WA

International Classification:

B24B 1/00

US Classification:

451 44, 451 54, 451287

Abstract:

A slurry recycling apparatus having a first filter, a dirty side storage tank, slurry pump, second filter, clean side storage tank and slurry outlet, in which used slurry from an edge notch polishing apparatus is delivered to the first screen filter, transported to the dirty side slurry storage tank, pumped from the dirty side slurry storage tank through a second filter that filters out small particulate matter from the slurry and allows the slurry to pass to the clean side slurry storage tank, and finally to the edge notch polishing apparatus as needed. Slurry which is not immediately taken from the clean side slurry storage tank is continuously recycled through the second filter by overflowing from the clean side to the dirty side slurry storage tank where it is there pumped through the second filter back into the clean side slurry storage tank.