Michael Ray Lacy

US Patent:

6498497, Dec 24, 2002

Filed:

Aug 13, 1999

Appl. No.:

09/374878

Inventors:

Calvin Y. H. Chow - Portola Valley CA
Morten J. Jensen - San Francisco CA
Colin B. Kennedy - Mill Valley CA
Michael M. Lacy - Ben Lomond CA
Robert E. Nagle - Mountain View CA

Assignee:

Caliper Technologies Corp. - Mountain View CA

International Classification:

G01R 3500

US Classification:

324601, 324607

Abstract:

A microfluidic controller and detector system and method for performing screening assays are disclosed. The microfluidic controller and detector system comprises a fluidic chip that includes at least two intersecting channels and a detection zone, a fluid direction system comprising an electrical interface configured for electrical contact with the at least two intersecting channels, an optics block having an objective lens disposed adjacent the detection zone, and a control system coupled to the optics block and adapted to receive and analyze data from the optics block. The electrical interface generally includes electrodes configured for electrical contact with the intersecting channels and coupled to electrode channels for supplying electrical input to the electrodes. A reference channel is optionally provided to calibrate the electrode channels.

US Patent:

6554688, Apr 29, 2003

Filed:

Jan 4, 2001

Appl. No.:

09/754702

Inventors:

Michael S. Lacy - Pleasanton CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B24B 100

US Classification:

451 56, 451 72, 451443, 451444

Abstract:

A method and apparatus for conditioning a polishing pad is described, wherein the polishing pad has a polishing surface for polishing the semiconductor wafer, and a back surface opposed to the polishing surface. The method includes positioning a sonic energy generator adjacent to the back surface of the polishing pad, and generating sonic energy through the back surface of the polishing pad. The apparatus includes a sonic energy generator adapted to be positioned adjacent the back surface, the sonic energy generator including a transducer connected to a contact member, wherein the sonic energy generator is adapted to transmit sonic energy in a direction through the back surface and to the polishing surface of the polishing belt.

US Patent:

6609961, Aug 26, 2003

Filed:

Jan 9, 2001

Appl. No.:

09/757452

Inventors:

Michael S. Lacy - Pleasanton CA
John M. Boyd - Atascadero CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B24B 2100

US Classification:

451296, 451168, 451533

Abstract:

A method of producing a chemical mechanical planarization (CMP) polishing belt structure is disclosed that includes forming a strip of substantially rigid material into a support belt having an interior surface and an exterior surface. At least a portion of the exterior surface of the support belt is altered to form a plurality of gripping members integral with the exterior surface of the support belt. An interior surface of a seamless CMP belt is applied to the exterior surface of the support belt such that the plurality of gripping members engage the interior surface of the seamless CMP belt in a non-slip grip.

US Patent:

6693709, Feb 17, 2004

Filed:

Oct 7, 2002

Appl. No.:

10/266062

Inventors:

Mark Wechsler - San Mateo CA
Howard H. Barney - Portland OR
Roger A. Kaye - Mountain View CA
David G. Ogle - Los Altos CA
Michael M. Lacy - Ben Lomond CA
Calvin Y. Chow - Portola Valley CA
Kimberly L. Crawford - Cupertino CA
Dean G. Hafeman - Hillsborough CA

Assignee:

Molecular Devices Corporation - Sunnyvale CA

International Classification:

G01J 330

US Classification:

356318, 356440

Abstract:

The present invention relates to a photometric device for measuring optical parameters. The invention functions in the ultraviolet light range through use of a monochromator and splits the test light in multiple channels by a rotor assembly, including a mirror.

US Patent:

6809031, Oct 26, 2004

Filed:

Dec 27, 2000

Appl. No.:

09/752610

Inventors:

Michael S. Lacy - Pleasanton CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 21302

US Classification:

438690, 438691, 438692, 438697, 438700

Abstract:

In a method for manufacturing a test pattern wafer, a silicon substrate is provided. A sacrificial oxide layer is deposited over the silicon substrate, and simulated transistor structure test features are fabricated into and on the sacrificial oxide layer. Chemical mechanical polishing characterization is performed using the test pattern wafer which provides data for the characterization of the chemical mechanical polishing. The sacrificial oxide layer is then stripped along with the simulated transistor structure test features, allowing the silicon substrate to be reclaimed and to be used in the fabrication of subsequent test pattern wafers.

US Patent:

6986837, Jan 17, 2006

Filed:

Aug 9, 2002

Appl. No.:

10/215885

Inventors:

Calvin Y. H. Chow - Portola Valley CA, US
Morten J. Jensen - San Francisco CA, US
Colin B. Kennedy - Mill Valley CA, US
Michael M. Lacy - Ben Lomond CA, US
Robert E. Nagle - Mountain View CA, US

Assignee:

Caliper Life Sciences, Inc. - Mountain View CA

International Classification:

G01N 27/453

US Classification:

204603, 422 99

Abstract:

A microfluidic controller and detector system and method for performing screening assays are disclosed. The microfluidic controller and detector system comprises a fluidic chip that includes at least two intersecting channels and a detection zone, a fluid direction system comprising an electrical interface configured for electrical contact with the at least two intersecting channels, an optics block having an objective lens disposed adjacent the detection zone, and a control system coupled to the optics block and adapted to receive and analyze data from the optics block. The electrical interface generally includes electrodes configured for electrical contact with the intersecting channels and coupled to electrode channels for supplying electrical input to the electrodes. A reference channel is optionally provided to calibrate the electrode channels.

US Patent:

61511110, Nov 21, 2000

Filed:

Sep 15, 1997

Appl. No.:

8/929552

Inventors:

Mark Wechsler - San Mateo CA
Howard H. Barney - Portland OR
Roger A. Kaye - Mountain View CA
David G. Ogle - Los Altos CA
Michael M. Lacy - Ben Lomond CA
Calvin Y. Chow - Portola Valley CA
Kimberly L. Crawford - Cupertino CA
Dean G. Hafeman - Hillsborough CA

Assignee:

Molecular Devices Corporation - Sunnyvale CA

International Classification:

G01J 330

US Classification:

356318

Abstract:

The present invention relates to a photometric device for measuring optical parameters. The invention functions in the ultraviolet light range through use of a monochromator and splits the test light in multiple channels by a rotor assembly, including a mirror.

US Patent:

55573983, Sep 17, 1996

Filed:

Apr 15, 1994

Appl. No.:

8/228436

Inventors:

Mark Wechsler - San Mateo CA
Howard H. Barney - Portland OR
Roger A. Kaye - Mountain View CA
David G. Ogle - Los Altos CA
Michael M. Lacy - Ben Lomond CA
Calvin Y. Chow - Portola Valley CA
Kimberly L. Crawford - Cupertino CA
Dean G. Hafeman - Hillsborough CA

Assignee:

Molecular Devices Corporation - Sunnyvale CA

International Classification:

G01J 330

US Classification:

356318

Abstract:

The present invention relates to a photometric device for measuring optical parameters. The invention functions in the ultraviolet light range through use of a monochromator and splits the test light in multiple channels by a rotor assembly, including a mirror.