Michael J Lopez

US Patent:

D561193, Feb 5, 2008

Filed:

May 26, 2006

Appl. No.:

29/260539

Inventors:

Beth Ellyn O'Mullan - Danville CA, US
Michael Lopez - San Ramon CA, US

Assignee:

Google Inc. - Mountain View CA

International Classification:

1404

US Classification:

D14489, D14487

US Patent:

D619614, Jul 13, 2010

Filed:

Sep 7, 2007

Appl. No.:

29/284464

Inventors:

Beth Ellyn O'Mullan - Danville CA, US
Michael Lopez - San Ramon CA, US

Assignee:

Google Inc. - Mountain View CA

International Classification:

3200

US Classification:

D14489

US Patent:

20230020387, Jan 19, 2023

Filed:

Nov 19, 2020

Appl. No.:

17/777656

Inventors:

- Fremont CA, US
Lin XU - Fremont CA, US
John DAUGHERTY - Fremont CA, US
John Michael KERNS - Livermore CA, US
Satish SRINIVASAN - Newark CA, US
Robin KOSHY - Fremont CA, US
Michael LOPEZ - Redwood City CA, US
Douglas DETERT - Berkeley CA, US

International Classification:

C23C 16/40
C23C 4/11
H01J 37/32
C23C 16/56
C23C 14/08
C23C 14/58

Abstract:

A method for forming a coating on a component of a substrate processing system includes arranging the component in a processing chamber and applying a ceramic material to form the coating on one or more surfaces of the component. The ceramic material is comprised of a mixture including a rare earth oxide and having a grain size of less than 150 nm and is applied while a temperature within the processing chamber is less than 400 C. The coating has a thickness of less than 30 μm. A heat treatment process is performed on the coated component in a heat treatment chamber. The heat treatment process includes increasing a temperature of the heat treatment chamber from a first temperature to a second temperature that does not exceed a melting temperature of the mixture over a first period and maintaining the second temperature for a second period.

US Patent:

20170074646, Mar 16, 2017

Filed:

Sep 15, 2015

Appl. No.:

14/855242

Inventors:

- Fremont CA, US
Duane Outka - Fremont CA, US
Michael Lopez - Redwood City CA, US

International Classification:

G01B 11/30
H01J 37/32

Abstract:

A method for treating a nonhomogeneous material surface of an object is provided. A plurality of test patches of the surface is treated for different amounts of time wherein the plurality of test patches have a total surface area. A property of each test patch is measured. A calibration curve of the property is generated with respect to time. The calibration curve and a target property are used to obtain a target time. A surface of the object with a surface area, which is greater than the total surface area of the plurality of test patches, is treated for the target time.