Michael Linn Mcnutt

US Patent:

6788074, Sep 7, 2004

Filed:

Jun 21, 2002

Appl. No.:

10/176888

Inventors:

Robin C. Sarma - Plano TX
Michael J. McNutt - El Toro CA

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

G01R 2726

US Classification:

324663, 324765, 438 17, 700121

Abstract:

A method for measuring a capacitance of a semiconductor is provided that includes positioning a measurement circuit in a scribe line area associated with the semiconductor. The scribe line area is indicative of a delineation that separates one or more portions of the semiconductor. A capacitance of one or more elements included within the one or more portions of the semiconductor is then measured using the measurement circuit. The method also includes comparing the capacitance measurement of the one or more elements included within the one or more portions of the semiconductor to a reference set of capacitance values such that a parameter associated with a manufacturing process that generated the semiconductor may be checked.