Michael J Moriarty

US Patent:

8170832, May 1, 2012

Filed:

Nov 2, 2009

Appl. No.:

12/611023

Inventors:

Richard J. Young - Beaverton OR, US
Brennan Peterson - Portland OR, US
Rudolf Johannes Peter Gerardus Schampers - Belfeld, NL
Michael Moriarty - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

G01N 23/04
G06F 17/00

US Classification:

702170, 702 97, 702172, 702155, 850 8

Abstract:

A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create TEM samples by using a precise endpoint detection method. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide methods for endpointing sample thinning and methods to partially or fully automate endpointing.

US Patent:

20120187285, Jul 26, 2012

Filed:

Apr 6, 2012

Appl. No.:

13/441465

Inventors:

RICHARD J. YOUNG - BEAVERTON OR, US
BRENNAN PETERSON - PORTLAND OR, US
RUDOLF JOHANNES PETER GERARDUS SCHAMPERS - BELFELD, NL
MICHAEL MORIARTY - PORTLAND OR, US

Assignee:

FEI COMPANY - HILLSBORO OR

International Classification:

G21K 5/00
G01D 18/00
H01J 37/26

US Classification:

2502521, 250307, 250311

Abstract:

A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create TEM and STEM samples by using a precise endpoint detection method. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide methods for endpointing sample thinning and methods to partially or fully automate endpointing.

US Patent:

20130143412, Jun 6, 2013

Filed:

May 25, 2012

Appl. No.:

13/481351

Inventors:

Michael Moriarty - Portland OR, US
Stacey Stone - Beaverton OR, US
Jeff Blackwood - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

H01L 21/02

US Classification:

438759

Abstract:

A method and apparatus for preparing thin TEM samples in a manner that reduces or prevents bending and curtaining is realized. Embodiments of the present invention deposit material onto the face of a TEM sample during the process of preparing the sample. In some embodiments, the material can be deposited on a sample face that has already been thinned before the opposite face is thinned, which can serve to reinforce the structural integrity of the sample and refill areas that have been over-thinned due to a curtaining phenomena. In other embodiments, material can also be deposited onto the face being milled, which can serve to reduce or eliminate curtaining on the sample face.

US Patent:

20130319849, Dec 5, 2013

Filed:

May 21, 2013

Appl. No.:

13/899278

Inventors:

Scott Edward Fuller - Portland OR, US
Michael Moriarty - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

H01J 37/302
G01N 1/32

US Classification:

20419234, 20429836

Abstract:

A method and apparatus for producing thin lamella for TEM observation. The steps of the method are robust and can be used to produce lamella in an automated process. In some embodiments, a protective coating have a sputtering rate matched to the sputtering rate of the work piece is deposited before forming the lamella. In some embodiments, the bottom of the lamella slopes away from the feature of interest, which keeps the lamella stable and reduces movement during thinning. In some embodiments, a fiducial is used to position the beam for the final thinning, instead of using an edge of the lamella. In some embodiments, the tabs are completed after high ion energy final thinning to keep the lamella more stable. In some embodiments, a defocused low ion energy and pattern refresh delay is used for the final cut to reduce deformation of the lamella.

US Patent:

20140061032, Mar 6, 2014

Filed:

Aug 31, 2012

Appl. No.:

13/600843

Inventors:

Thomas G. Miller - Portland OR, US
Jason Arjavac - Hillsboro OR, US
Michael Moriarty - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

C23F 1/04

US Classification:

20419233, 20419234, 20429836, 20429832

Abstract:

A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.

US Patent:

20200095688, Mar 26, 2020

Filed:

Sep 10, 2019

Appl. No.:

16/566647

Inventors:

- Hillsboro OR, US
Jason Arjavac - Hillsboro OR, US
Michael Moriarty - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

C23F 1/04
H01J 37/302
G01N 1/32
H01J 37/305

Abstract:

A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.

US Patent:

20150179402, Jun 25, 2015

Filed:

Dec 16, 2014

Appl. No.:

14/572626

Inventors:

- Hillsboro OR, US
Michael Moriarty - Portland OR, US
Stacey Stone - Portland OR, US
Jeffrey Blackwood - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

H01J 37/305
C23C 14/30

Abstract:

A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample using charged particle beam deposition just before or during the final milling, which results in an artifact-free surface. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.

Address:

485 Quaker St, Lincoln, VT 05443

Phone:

8023169461

VIN:

3VWBZ7AJ2BM388425

Make:

VOLKSWAGEN

Model:

JETTA

Year:

2011