Michael R Robles

US Patent:

20090207399, Aug 20, 2009

Filed:

Dec 19, 2008

Appl. No.:

12/318035

Inventors:

Alex F. Fong - San Jose CA, US
Henricus Wilhelmus Maria Van Buel - s-Hertogenbosch, NL
Joseph J. Consolini - Costa Mesa CA, US
Michael Josephus Evert Van De Moosdijk - Eindhoven, NL
Michael Charles Robles - Santa Cruz CA, US

Assignee:

ASML NETHERLANDS B.V. - Veldhoven
ASML Holding NV - Veldhoven

International Classification:

G03B 27/58
G01B 11/00

US Classification:

355 72, 356401

Abstract:

A method of calibrating a front to backside alignment capable lithographic apparatus. The method includes attaching a substrate having a plurality of alignment marks to a carrier, the substrate being arranged such that the alignment marks face towards the carrier; reducing the thickness of the substrate; using an alignment system of the apparatus to measure the positions of images of alignment marks formed by optics in a substrate table of the apparatus; projecting a pattern onto the substrate, the position of the pattern being determined according to the measured positions of the alignment marks; measuring the positions of the projected pattern and the alignment marks provided on the opposite side of the substrate, the position of the alignment marks provided on the opposite side of the substrate being measured by the alignment system directing radiation through the substrate; and comparing the measured positions in order to determine an overlay error.

US Patent:

20170321821, Nov 9, 2017

Filed:

May 8, 2017

Appl. No.:

15/589477

Inventors:

- Palo Alto CA, US
Stephen R. Quake - Stanford CA, US
Michael Robles - Mountain View CA, US
Jason Khoo - East Palo Alto CA, US

International Classification:

F16K 99/00
F16K 99/00
F16K 99/00
F16K 99/00

Abstract:

A fluid valve is provided that includes a first planar substrate having a smooth surface or a surface with features, an elastomer disposed on the first substrate, a second planar substrate disposed on another side of the elastomer, where the second substrate has a smooth surface or features, where the first and second substrate are more rigid than the elastomer, where the first substrate, the second substrate or the elastomer has a fluid channel, where the channel is open when the first or second substrate are in a first thermal state or a first compression state, where the channel is closed or partially closed when the first or second substrate are in a second thermal state or a second compression state, where the second thermal state is a different temperature than the first thermal state, where the second compression state is a different pressure than the first compression state.

US Patent:

20140326400, Nov 6, 2014

Filed:

Apr 30, 2014

Appl. No.:

14/266381

Inventors:

Ismail Emre Araci - Redwood City CA, US
Stephen Quake - Aptos CA, US
Michael Robles - Aptos CA, US
Daniel Bechstein - Palo Alto CA, US

International Classification:

F16K 99/00
B32B 37/24

US Classification:

156242

Abstract:

A fabrication method of a micromechanical valve includes: (1) forming a control layer according to a first weight ratio of cross linker: elastomer base; (2) forming a flow layer according to a second weight ratio of cross linker: elastomer base; (3) forming a membrane layer according to a third weight ratio of cross linker: elastomer base, where the third weight ratio is smaller than the first weight ratio, and is smaller than the second weight ratio; (4) bonding the membrane layer to the control layer to form a two-layer structure; and (5) bonding the two-layer structure to the flow layer to form the micromechanical valve.