Muzammil A Arain

US Patent:

8279511, Oct 2, 2012

Filed:

Jul 13, 2009

Appl. No.:

12/996695

Inventors:

Volker M. Quetschke - Brownsville TX, US
Wan Wu - Yorktown VA, US
Luke Williams - Gainesville FL, US
Muzammil A. Arain - Gainesville FL, US
Rodica Martin - Gainesville FL, US
David Reitze - Gainesville FL, US
David B. Tanner - Gainesville FL, US
Guido Mueller - Newberry FL, US

Assignee:

University of Florida Research Foundation, Inc. - Gainseville FL

International Classification:

G02F 1/03

US Classification:

359254, 359256

Abstract:

Embodiments relate to a method and apparatus for producing polarized light, having a modulator crystal, where the modulator crystal incorporates a birefringent electro- optic material. The modulator crystal has an optic axis, a first polarization axis, and a second polarization axis, where the first polarization axis and second polarization axis are each perpendicular to the optic axis and perpendicular to each other. The apparatus can also include an electrode pair, where application of an electric field modulates light passing through the modulator crystal that is polarized along the first polarization axis. Embodiments pertain to a method and apparatus for modulating light. The apparatus incorporates a modulator crystal having an electro-optic material. The device also has at least two electrode pairs, where each electrode pair that modulates light passing through the modulator crystal that has a direction of travel that has a component parallel to the optic axis.

US Patent:

8446657, May 21, 2013

Filed:

Aug 21, 2012

Appl. No.:

13/590383

Inventors:

Volker M. Quetschke - Brownsville TX, US
Wan Wu - Yorktown VA, US
Luke Williams - Gainesville FL, US
Muzammil A. Arain - Gainesville FL, US
Rodica Martin - Gainesville FL, US
David Reitze - Gainesville FL, US
David B. Tanner - Gainesville FL, US
Guido Mueller - Gainesville FL, US

Assignee:

University of Florida Research Foundation, Inc. - Gainesville FL

International Classification:

G02F 1/03
G02F 1/295

US Classification:

359251, 359246, 359252, 359254, 385 8

Abstract:

Embodiments relate to a method and apparatus for producing polarized light, having a modulator crystal, where the modulator crystal incorporates a birefringent electro-optic material. The modulator crystal has an optic axis, a first polarization axis, and a second polarization axis, where the first polarization axis and second polarization axis are each perpendicular to the optic axis and perpendicular to each other. The apparatus can also include an electrode pair, where application of an electric field modulates light passing through the modulator crystal that is polarized along the first polarization axis. Embodiments pertain to a method and apparatus for modulating light. The apparatus incorporates a modulator crystal having an electro-optic material. The device also has at least two electrode pairs, where each electrode pair modulates light passing through the modulator crystal that has a direction of travel that has a component parallel to the optic axis.

US Patent:

20110080663, Apr 7, 2011

Filed:

Aug 4, 2009

Appl. No.:

12/995566

Inventors:

Muzammil Arshad Arain - San Jose CA, US
Rodica Mirela Martin - Gainesville FL, US
Guido Mueller - Newberry FL, US
Volke Marcel Quetschke - Brownsville TX, US
David Howard Reitze - Gainesville FL, US
David Burnham Tanner - Gainesville FL, US
Luke Fraser Williams - Gainesville FL, US

International Classification:

G02B 27/09
G02B 7/185
G02B 7/02

US Classification:

359820, 359896, 359846

Abstract:

Provided is an adaptive device for shaping a laser beam. The adaptive device includes a variable optical configuration. The variable optical configuration includes: an optical element and a temperature element in contact with the optical element. The adaptive device further includes a controller operatively coupled to the temperature element to apply at least one of heating and cooling to the optical element so as to alter a temperature profile of the optical element, thereby causing an optical property change thereof.

US Patent:

20130245985, Sep 19, 2013

Filed:

Mar 11, 2013

Appl. No.:

13/794337

Inventors:

Lawrence Rotter - Pleasanton CA, US
Muzammil Arain - Milpitas CA, US

Assignee:

KLA-TENCOR CORPORATION - Milpitas CA

International Classification:

G05B 23/00

US Classification:

702105

Abstract:

Methods and systems for matching critical dimension measurement applications at high precision across multiple optical metrology systems are presented. In one aspect, machine parameter values of a metrology system are calibrated based on critical dimension measurement data. In one further aspect, calibration of the machine parameter values is based on critical dimension measurement data collected by a target measurement system from a specimen with assigned critical dimension parameter values obtained from a reference measurement source. In another further aspect, the calibration of the machine parameter values of a target measurement system is based on measurement data without knowledge of critical dimension parameter values. In some examples, the measurement data includes critical dimension measurement data and thin film measurement data. Calibration of machine parameter values based on critical dimension data enhances application and tool-to-tool matching among systems for measurement of critical dimensions, film thickness, film composition, and overlay.

US Patent:

20200196863, Jun 25, 2020

Filed:

Aug 10, 2018

Appl. No.:

16/633139

Inventors:

- Dublin CA, US
Muzammil ARAIN - Dublin CA, US
Keith BROCK - Dublin CA, US
Scott CHANG - Dublin CA, US
Matthew J. EVERETT - Livermore CA, US
Zubir KHAN - Dublin CA, US
Archana KOLLI - Dublin CA, US
Priya KULKARNI - Dublin CA, US
Benjamin KWOK - Dublin CA, US
Conor LEAHY - Dublin CA, US
Gary LEE - Dublin CA, US
Jennifer LUU - Dublin CA, US
Pranav MALVANIA - Dublin CA, US
David NOLAN - Dublin CA, US
Keith O'HARA - Pleasanton CA, US
Sunny VIRMANI - Dublin CA, US
Richard ORLOWSKI - Dublin CA, US

Assignee:

Carl Zeiss Meditec, Inc. - Dublin CA
Carl Zeiss Meditec AG - Jena CA

International Classification:

A61B 3/15
A61B 3/00
A61B 3/12
A61B 3/10

Abstract:

An ophthalmic imaging system has a specialized graphical user interface GUI to convey information for manually adjusting control inputs to bring an eye into alignment with the device. The GUI provides additional information such as laterality, visual alignment overlay aids, and live video feeds. The system further applies automatic gain control to fundus images, synchronizes itself with other ophthalmic systems on a computer network, and provides an optimized image load and display system.

US Patent:

20170146399, May 25, 2017

Filed:

Dec 5, 2016

Appl. No.:

15/369560

Inventors:

- Milpitas CA, US
Andrei V. Shchegrov - Campbell CA, US
Lawrence D. Rotter - Pleasanton CA, US
Derrick A. Shaughnessy - San Jose CA, US
Anatoly Shchemelinin - Bozeman MT, US
Ilya Bezel - Mountain View CA, US
Muzammil A. Arain - Milpitas CA, US
Anatoly A. Vasiliev - Sunnyvale CA, US
James Andrew Allen - Elk Grove CA, US
Oleg Shulepov - San Jose CA, US
Andrew V. Hill - Berkley CA, US
Ohad Bachar - Timrat, IL
Moshe Markowitz - Haifa, IL
Yaron Ish-Shalom - Kyryat Tivon, IL
Ilan Sela - Haifa, IL
Amnon Manassen - Haifa, IL
Alexander Svizher - Haifa, IL
Maxim Khokhlov - Haifa, IL
Avi Abramov - Haifa, IL
Oleg Tsibulevsky - Migdal Haemeq, IL
Daniel Kandel - Aseret, IL
Mark Ghinovker - Yoqneam Ilit, IL

International Classification:

G01J 3/10
H01J 65/04
G01J 3/02
G02B 6/293
G01J 3/12

Abstract:

A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

US Patent:

20170052112, Feb 23, 2017

Filed:

Nov 7, 2016

Appl. No.:

15/344704

Inventors:

- Milpitas CA, US
Klaus Flock - Sunnyvale CA, US
Muzammil Arain - Milpitas CA, US
David Y. Wang - Santa Clara CA, US

International Classification:

G01N 21/23
G01N 21/21
G01N 21/95
G02B 5/30

Abstract:

A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

US Patent:

20150285735, Oct 8, 2015

Filed:

Jun 19, 2015

Appl. No.:

14/745047

Inventors:

- Milpitas CA, US
Klaus Flock - Sunnyvale CA, US
Lawrence Rotter - Pleasanton CA, US
Shankar Krishnan - Santa Clara CA, US
Johannes D. de Veer - Menlo Park CA, US
Catalin Filip - Pleasanton CA, US
Gregory Brady - Campbell CA, US
Muzammil Arain - Milpitas CA, US
Andrei Shchegrov - Campbell CA, US

Assignee:

KLA- Tencor Corporation - Milpitas CA

International Classification:

G01N 21/21
G01N 21/95

Abstract:

An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.