Nathan A Mcdaniel

US Patent:

20030133116, Jul 17, 2003

Filed:

Jan 16, 2002

Appl. No.:

10/052091

Inventors:

Michelle Lam - Gilbert AZ, US
Nathan McDaniel - Chandler AZ, US
Gary Barnes - Phoenix AZ, US
Rene Cruz - Avondale AZ, US

Assignee:

Intel Corporation

International Classification:

G01B011/00

US Classification:

356/401000

Abstract:

A transparent plate with fiducials for aligning and placing of dies on a panel with a high degree of accuracy is disclosed. The locations of the fiducials correspond to desired die locations. The transparent plate is arranged beneath the panel, with the fiducials aligned with cavities formed in the panel. The cavities have transparent bottoms. A die alignment mark on a die residing over the panel is used to establish the position of the die. Imaging a fiducial associated with a cavity is used to center the die with respect to the cavity. Accurate placement of the fiducials is accomplished by electron-beam lithography.