Eugene David Feit - Berkeley Heights NJ Newton Schwartz - Morristown NJ
Assignee:
Bell Telephone Laboratories, Incorporated - Murray Hill NJ
International Classification:
C25D 1126 H01G 1300
US Classification:
204 38A
Abstract:
A technique is described for depositing organic layers down to a fraction of a monolayer thickness upon insulating substrates by non-vacuum deposition techniques which permit the subsequent deposition of mechanically stable adherent films of b. c. c. tantalum of low resistivity. The deposited films permit the fabrication of low cost, high frequency performance tantalum thin film capacitors.