Nicholas M Webb

US Patent:

6846726, Jan 25, 2005

Filed:

Sep 20, 2002

Appl. No.:

10/247722

Inventors:

Daxing Ren - Pleasanton CA, US
Jerome S. Hubacek - Fremont CA, US
Nicholas E. Webb - Milpitas CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 2146
H01L 2178
H01L 21301

US Classification:

438460, 438745, 438753

Abstract:

Silicon parts of a semiconductor processing apparatus containing low levels of metal impurities that are highly mobile in silicon are provided. The silicon parts include, for example, rings, electrodes and electrode assemblies. The silicon parts can reduce metal contamination of wafers processed in plasma atmospheres.

US Patent:

7517803, Apr 14, 2009

Filed:

Sep 28, 2004

Appl. No.:

10/950656

Inventors:

Daxing Ren - Pleasanton CA, US
Jerome S. Hubacek - Fremont CA, US
Nicholas E. Webb - Milpitas CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 21/302

US Classification:

438710, 438706, 438719, 438729, 257E21218

Abstract:

Silicon parts of a semiconductor processing apparatus containing low levels of metal impurities that are highly mobile in silicon are provided. The silicon parts include, for example, rings, electrodes and electrode assemblies. The silicon parts can reduce metal contamination of wafers processed in plasma atmospheres.

US Patent:

20160334379, Nov 17, 2016

Filed:

May 15, 2015

Appl. No.:

14/714065

Inventors:

- Mountain View CA, US
Mathias Schmidt - Emeryville CA, US
Poll Shih - New Taipei City, TW
William Dong - Palo Alto CA, US
Nicholas Webb - Menlo Park CA, US

Assignee:

GOOGLE INC. - Mountain View CA

International Classification:

G01N 33/00

Abstract:

A hazard detector includes a chassis configured to house components of the hazard detector. The chassis includes a front defining a central aperture. The front has a domed contour such that an outer edge of an inner portion extends beyond an outer periphery of the front. The inner surface tapers from the outer edge toward the inner portion. The detector includes a mesh formed to the contour of the front so the mesh is flat against the front. The mesh defines an aperture corresponding to the central aperture. The detector includes a grille secured to the chassis that defines an aperture corresponding to the central aperture and defines openings positioned along the grille. An inner surface of the grille includes a contour corresponding to the contour of the front so the mesh is flat against the inner surface. The mesh is positioned between the grille and the chassis.