Nora Virginia Edwards

US Patent:

20060160034, Jul 20, 2006

Filed:

Jan 20, 2005

Appl. No.:

11/038838

Inventors:

Stefan Wurm - Austin TX, US
Nora Edwards - Austin TX, US

International Classification:

G03F 7/00

US Classification:

430330000

Abstract:

A reflective material is heated to reduce internal stress, and then a capping layer is formed over the reflective material. Heating the reflective material reduces the internal stress of the reflective material. Because the reflective material has reduced internal stress, a more continuous, stable and reliable capping layer is formed that is not subject to stress induced degradation over time due to the relaxing internal stress of the underlying reflective material. Thus, the capping layer remains intact and protects the reflective material residing beneath the capping layer from exposure to contaminants.