Oscar C Gomez

US Patent:

20080103623, May 1, 2008

Filed:

Jun 28, 2007

Appl. No.:

11/770546

Inventors:

Oscar Gomez - South San Francisco CA, US
Jeffrey Barrett Robinson - San Jose CA, US
Jason Kirk Foster - San Jose CA, US
Duc Dang Buckius - Union City CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700121

Abstract:

One embodiment of an apparatus includes a flat, plate-shaped template adapted for facilities integration. The template defines a plurality of apertures arranged in a predetermined pattern of locations, each template aperture adapted to position a facility conduit passing through each template aperture in a predetermined location to facilitate subsequently coupling the positioned facility conduit to the wafer processing tool. Other embodiments are described and claimed.

US Patent:

20110033620, Feb 10, 2011

Filed:

Aug 2, 2010

Appl. No.:

12/848782

Inventors:

Alexander S. Polyak - San Jose CA, US
Tom K. Cho - Los Altos CA, US
Oscar Gomez - San Francisco CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

C23C 16/458
C23C 16/00

US Classification:

4272481, 118500

Abstract:

A method and apparatus for a lift pin is described. In one embodiment, a lift pin head is described. The lift pin head includes a base member having a body made of a first material having a first coefficient of thermal expansion, and a tip disposed on the base member, the base member having a body made of a second material that is flexible at room temperature and having a second coefficient of thermal expansion, the first coefficient of thermal expansion being less than the second coefficient of thermal expansion.