Paul K Dozoretz

US Patent:

6361607, Mar 26, 2002

Filed:

Feb 12, 2001

Appl. No.:

09/782105

Inventors:

Paul Dozoretz - Thornton CO
Youfan Gu - Superior CO

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

C23C 1600

US Classification:

118715, 438905, 55522, 55525

Abstract:

A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO -rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.

US Patent:

6562109, May 13, 2003

Filed:

Mar 28, 2001

Appl. No.:

09/821713

Inventors:

Darren Livingston - Denver CO
Youfan Gu - Superior CO
Paul Dozoretz - Thornton CO
James M. Mueller - Lafayette CO

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

B01D 4514

US Classification:

95270, 55438, 55423, 422212, 422215, 422187

Abstract:

Trap apparatus and method for removing contaminants from the gaseous effluent flows from chemical vapor deposition chambers and processes by flowing the particle laden gas into an upper chamber of the trap apparatus, imparting additional kinetic energy to the powder particles to enhance separation of the powder particles from the gas, and then flowing the gas, sans the powder particles, out of the trap, while the powder particles fall into and are captured by a lower chamber positioned below the upper chamber and remote from the flowing gas. An impeller positioned in the upper chamber in the inlet path imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas into the upper chamber for capture as previously described.

US Patent:

6895178, May 17, 2005

Filed:

Jul 16, 2002

Appl. No.:

10/196572

Inventors:

Youfan Gu - Superior CO, US
Paul Dozoretz - Hudson CO, US
Benjamin Goss - Boulder CO, US
David Neumeister - Loveland CO, US
James Mueller - Lafayette CO, US
Donald W. Higgins - Hudson NH, US

Assignee:

MKS Instruments, Inc. - Wilmington MA

International Classification:

F24F006/00

US Classification:

392394, 392403

Abstract:

The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.

US Patent:

6909975, Jun 21, 2005

Filed:

Nov 24, 2003

Appl. No.:

10/721817

Inventors:

Paul Dozoretz - Hudson CO, US
Youfan Gu - Superior CO, US
Garry Holcomb - Boulder CO, US
Ole Wenzel - Aalsgaarde, DK

Assignee:

MKS Instruments, Inc. - Wilmington MA

International Classification:

G01F023/14
G01L009/12

US Classification:

702 50, 7315253, 73724, 702 45, 702 47, 702 55

Abstract:

A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.

US Patent:

7477996, Jan 13, 2009

Filed:

Jun 6, 2007

Appl. No.:

11/759202

Inventors:

Paul Dozoretz - Hudson CO, US
Youfan Gu - Superior CO, US
Garry Holcomb - Boulder CO, US
Ole Wenzel - Aalsgaarde, DK

Assignee:

MKS Instruments, Inc. - Wilmington MA

International Classification:

G01F 23/14

US Classification:

702 50, 73714, 73718, 702 45, 702 47, 702 55

Abstract:

A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.

US Patent:

7871587, Jan 18, 2011

Filed:

Dec 22, 2009

Appl. No.:

12/645455

Inventors:

Youfan Gu - Superior CO, US
Paul Dozoretz - Hudson CO, US

Assignee:

MKS Instruments, Inc. - Boulder CO

International Classification:

B01D 53/38
B01D 53/68
B01D 53/76

US Classification:

423210, 422129, 422168, 422169, 422170, 422171, 422176, 422178, 422183

Abstract:

A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.

US Patent:

7962294, Jun 14, 2011

Filed:

Jan 13, 2009

Appl. No.:

12/353201

Inventors:

Paul Dozoretz - Hudson CO, US
Youfan Gu - Superior CO, US
Garry Holcomb - Boulder CO, US
Ole Wenzel - Aalsgaarde, DK

Assignee:

MKS Instruments, Inc - Andover MA

International Classification:

G01F 23/14

US Classification:

702 50, 73714, 73718, 702 45, 702 47, 702 55

Abstract:

A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.

US Patent:

20060004539, Jan 5, 2006

Filed:

Jun 21, 2005

Appl. No.:

11/158917

Inventors:

Paul Dozoretz - Hudson CO, US
Youfan Gu - Superior CO, US
Garry Holcomb - Boulder CO, US
Ole Wenzel - Aalsgaarde, DK

International Classification:

G01L 13/00

US Classification:

702140000

Abstract:

A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.