Paul A Rasmussen

US Patent:

6524707, Feb 25, 2003

Filed:

Jul 6, 2000

Appl. No.:

09/611040

Inventors:

Paul S. Rasmussen - Livermore CA

Assignee:

PowerStor Corporation - Dublin CA

International Classification:

B33B 900

US Classification:

428408, 428446, 428698, 428699

Abstract:

Provided is a technique in which a carbon structure is first coated with a tie layer as a intermediate prior to the deposition of metal on a carbon substrate. The tie layer is composed of a material with structural and chemical affinity for both carbon and metal. Capacitor electrodes formed according to this technique show very low Equivalent Series Resistance (ESR) and improved capacitance at high frequencies.

US Patent:

57478139, May 5, 1998

Filed:

Apr 14, 1994

Appl. No.:

8/227482

Inventors:

Adam E. Norton - Palo Alto CA
Chester L. Mallory - Campbell CA
Hung V. Pham - San Jose CA
Paul Rasmussen - Livermore CA

Assignee:

KLA-Tencop. Corporation - San Jose CA

International Classification:

G01N 2133

US Classification:

250372

Abstract:

An improved method and apparatus for measuring the relative reflectance spectra of an observed sample (3) and method and apparatus for autofocussing the sample (3). A broadband visible and ultraviolet beam (42) is split into a sample beam (46) and a reference beam (48). The sample beam (46) is reflected off the surface of the sample (3), and the spectrum of the reflected sample beam (46) is compared to the spectrum of the reference beam (48) to determine the relative reflectance spectrum of the sample (3). A video camera (96) is provided for viewing the sample (3). The autofocus system has a course-focus mode and a fine-focus mode. In the course-focus mode, the sample (3) is focused when the centroid of the sample image is centered on a position sensitive detector (99). In the fine-focus mode, the sample is focused when the intensity of light reaching the detector (99) is minimized.

US Patent:

52242005, Jun 29, 1993

Filed:

Nov 27, 1991

Appl. No.:

7/799524

Inventors:

Paul Rasmussen - Livermore CA
Anthony Bernhardt - Berkeley CA

Assignee:

The United States of America as represented by the Department of Energy - Washington DC

International Classification:

G02B 600

US Classification:

385146

Abstract:

The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.