Paul J Reid

Address:

9 Coult Ln, Old Lyme, CT 06371

Phone:

8604341954

VIN:

5TDYK3DC7BS095305

Make:

TOYOTA

Model:

SIENNA

Year:

2011

US Patent:

6589354, Jul 8, 2003

Filed:

Jan 4, 2001

Appl. No.:

09/753665

Inventors:

Paul B. Reid - Stamford CT 06903

International Classification:

B06B 704

US Classification:

134 1, 134 21, 134 34, 134 37, 15345

Abstract:

A method and system for in-situ cleaning of a reticle. Ionized gas is directed onto the reticle by a delivery device. The ionized gas neutralizes electro-static attraction between the reticle and particulate contaminants on the reticle and thereby dislodges them from the reticle. The ionized gas and particulate contaminants are then removed from the reticle by a vacuuming pump and transported from the system by a contaminant collector. As a result of the in-situ cleaning method and system, the overall risk of chip defects due to reticle particulate contaminants is reduced, and chip and wafer yield is improved.