Perry I Justesen

age ~65

from Cambridge, MA

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Perry Justesen Phones & Addresses

  • Cambridge, MA
Name / Title
Company / Classification
Phones & Addresses
Perry Justesen
Manager
PEREGRINE ENGINEERING LLC
920 Hale St, Beverly, MA 01915
Beverly, MA 01915

Us Patents

  • Heated Electrostatic Chuck Including Mechanical Clamp Capability At High Temperature

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  • US Patent:
    20110299217, Dec 8, 2011
  • Filed:
    Jun 3, 2011
  • Appl. No.:
    13/152735
  • Inventors:
    Perry J.I. Justesen - Beverly MA, US
    Allan D. Weed - Marblehead MA, US
    William Davis Lee - Newburyport MA, US
    Ashwin M. Purohit - Gloucester MA, US
    Robert D. Rathmell - Murphy TX, US
    Gary M. Cook - Newton MA, US
  • Assignee:
    Axcelis Technologies, Inc. - Beverly MA
  • International Classification:
    H01L 21/687
  • US Classification:
    361234
  • Abstract:
    An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.
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