Peter K Irwin

US Patent:

20140044503, Feb 13, 2014

Filed:

Aug 7, 2013

Appl. No.:

13/961538

Inventors:

Steve Szudarski - Fremont CA, US
Andrew Scott Cornelius - San Jose CA, US
Amitabh Puri - San Jose CA, US
Michael Robert Rice - Pleasanton CA, US
Jeffrey C. Hudgens - San Francisco CA, US
Steven V. Sansoni - Livermore CA, US
Robert Irwin Decottignies - Redwood City CA, US
Dean C. Hruzek - Cedar Park TX, US
Peter Irwin - Austin TX, US
Nir Merry - Mountain View CA, US

International Classification:

H01L 21/677

US Classification:

414217

Abstract:

In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.

US Patent:

58665994, Feb 2, 1999

Filed:

Jun 6, 1997

Appl. No.:

8/870363

Inventors:

Klaus Schelberger - Gonnheim, DE
Maria Scherer - Landau-Godramstein, DE
Hubert Sauter - Mannheim, DE
Manfred Hampel - Neustadt-Hambach, DE
Eberhard Ammermann - Heppenheim, DE
Gisela Lorenz - Neustadt, DE
Siegfried Strathmann - Limburgerhof, DE
Peter Irwin - Cary NC
Randall Evan Gold - Apex NC

Assignee:

BASF Aktiengesellschaft - Ludwigshafen

International Classification:

A01N 3712
A01N 3744
A01N 4340

US Classification:

514352

Abstract:

Fungicidal mixtures, comprising a) a phenyl-benzylether of the formula I. a, I. b or I. c, ##STR1## and b) a dinitroaniline of the formula II ##STR2## in a synergistically active amount.

US Patent:

60908351, Jul 18, 2000

Filed:

Sep 14, 1998

Appl. No.:

9/151810

Inventors:

Klaus Schelberger - Gonnheim, DE
Maria Scherer - Landau-Godramstein, DE
Hubert Sauter - Mannheim, DE
Manfred Hampel - Neustadt-Hambach, DE
Joachim Leyendecker - Ladenburg, DE
Eberhard Ammermann - Heppenheim, DE
Gisela Lorenz - Neustadt, DE
Siegfried Strathmann - Limburgerhof, DE
Peter Irwin - Cary NC
Randall Evan Gold - Apex NC

Assignee:

BASF Aktiengesellschaft - Ludwigschafen

International Classification:

A01N 4338
A01N 4350
A01N 4356
A01N 4376

US Classification:

514376

Abstract:

Fungicidal mixtures, comprising a. 1) a phenyl-benzylether of the formula I. a, I. b or I. c, ##STR1## or a. 1) a carbamate of the formula I. d, ##STR2## where X is CH and N, n is 0, 1 or 2 and R is halogen, C. sub. 1 -C. sub. 4 -alkyl and C. sub. 1 -C. sub. 4 -haloalkyl, it being possible for the radicals R to be different when n is 2, and b) a dicarboximide-type fungicide (II) in a synergistically active amount.