Phillip Reed Sullivan

US Patent:

20170074742, Mar 16, 2017

Filed:

Nov 4, 2016

Appl. No.:

15/343975

Inventors:

- Andover MA, US
Paul Lucas - Melrose MA, US
Stephen F. Bart - Newton MA, US
Phillip W. Sullivan - Lexington MA, US

International Classification:

G01L 19/00
G01L 9/00

Abstract:

A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.

US Patent:

20140238103, Aug 28, 2014

Filed:

Nov 5, 2013

Appl. No.:

14/072188

Inventors:

- Andover MA, US
Paul D. Lucas - Melrose MA, US
Stephen F. Bart - Newton MA, US
Phillip W. Sullivan - Lexington MA, US

Assignee:

MKS INSTRUMENTS, INC. - Andover MA

International Classification:

G01L 7/08

US Classification:

73 159, 73723, 73717

Abstract:

A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.