Rae Ann Knowles

US Patent:

20110031394, Feb 10, 2011

Filed:

Feb 6, 2008

Appl. No.:

12/525908

Inventors:

William Ralph Knowles - Hillsboro OR, US
Rae Knowles - HillsBoro OR, US
Milos Toth - Portland OR, US

Assignee:

FEI COMPANY - HILLSBORO OR

International Classification:

G01N 23/00

US Classification:

250307, 250310

Abstract:

The current invention includes methods and apparatuses for processing, that is, altering and imaging, a sample in a high pressure charged particle beam system. Embodiments of the invention include a cell in which the sample is positioned during high pressure charged particle beam processing. The cell reduces the amount of gas required for processing, thereby allowing rapid introduction, exhaustion, and switching between gases and between processing and imaging modes. Maintaining the processes gases within the cell protects the sample chamber and column from contact with the gases. In some embodiments, the temperature of the cell walls and the sample can be controlled.

US Patent:

20100108881, May 6, 2010

Filed:

Nov 4, 2008

Appl. No.:

12/264805

Inventors:

MILOS TOTH - Portland OR, US
Rae Knowles - Hillsboro OR, US
William Ralph Knowles - Hillsboro OR, US

Assignee:

FEI COMPANY - Hillsboro OR

International Classification:

G01N 23/00
G12B 21/00

US Classification:

250307, 250311, 850 21

Abstract:

A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.