Ralph J Palermo

US Patent:

20210053177, Feb 25, 2021

Filed:

Jan 24, 2019

Appl. No.:

16/963576

Inventors:

- Veldhoven, NL
Aydar AKCHURIN - Eindhoven, NL
Pavlo ANTONOV - Valkenburg (ZH), NL
Coen Hubertus Matheus BALTIS - Eindhoven, NL
Jeroen BOUWKNEGT - Tilburg, NL
Ann-Sophie m. FARLE - Eindhoven, NL
Christopher John MASON - Newtown CT, US
Ralph Nicholas PALERMO - Stratford CT, US
Thomas POIESZ - Veldhoven, NL
Yuri Johannes Gabriel VAN DE VIJVER - Best, NL
Jimmy Matheus Wilhelmus VAN DE WINKEL - Kessel, NL

Assignee:

ASML NETHERLANDS B.V. - Veldhoven
ASML HOLDING N.V. - Veldhoven

International Classification:

B24B 27/033
B24B 1/04
B24B 7/07
B24B 7/22
G03F 7/20
H01L 21/304

Abstract:

A treatment tool for reconditioning the top surfaces of a plurality of projections of a substrate support in a lithographic tool. The treatment tool includes a reconditioning surface which is rough relative to smoothed top surfaces of the projections and which reconditioning surface has material harder than that of the material of the top surfaces of the projections. A reconditioning method involves causing an interaction between the reconditioning surface of the treatment tool and the top surfaces of the projections of the substrate support, so as to leave these top surfaces rougher than they were prior to the interaction.