Raymond W O'Neill

US Patent:

20100288926, Nov 18, 2010

Filed:

Mar 27, 2007

Appl. No.:

12/294716

Inventors:

Scott A. Wiener - Mount Horeb WI, US
Thomas F. Kelly - Madison WI, US
David J. Larson - Madison WI, US
Keith J. Thompson - Fitchburg WI, US
Robert M. Ulfig - Middleton WI, US
Brian P. Geiser - Madison WI, US
Thomas C. Kunicki - Madison WI, US
Raymond W. O'Neill - Philadelphia PA, US
Jason Schneir - Madison WI, US

International Classification:

G01B 21/30

US Classification:

250309

Abstract:

The present invention relates to atom probe data and associated systems and methods. Aspects of the invention are directed toward a computing system configured to predict a characteristic associated with an atom probe specimen that includes a data set receiving component configured to receive a three-dimensional data set associated with a portion of the specimen. The system further includes a predicting/calculating component configured to predict the characteristic associated with the specimen based on the data set. Other aspects of the invention are directed toward a method for evaluating a manufacturing process using atom probe data that includes receiving a three-dimensional data set associated with a portion of a microelectronic assembly produced by a manufacturing process. The method further includes determining a variation between the data set and a configuration expected to result from the manufacturing process.