Richard A Collins

US Patent:

20120270384, Oct 25, 2012

Filed:

Jul 27, 2011

Appl. No.:

13/192101

Inventors:

ERROL ANTONIO C. SANCHEZ - Tracy CA, US
RICHARD O. COLLINS - Santa Clara CA, US
DAVID K. CARLSON - San Jose CA, US
KEVIN BAUTISTA - San Jose CA, US
HERMAN P. DINIZ - Fremont CA, US
KAILASH PATALAY - San Jose CA, US
NYI O. MYO - San Jose CA, US
DENNIS L. DEMARS - Santa Clara CA, US
CHRISTOPHE MARCADAL - Santa Clara CA, US
STEVE JUMPER - Dublin CA, US
SATHEESH KUPPURAO - San Jose CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

H01L 21/20
C23C 16/455
C23C 16/46

US Classification:

438503, 118725, 118719, 257E2109

Abstract:

Methods and apparatus for deposition of materials on a substrate are provided herein. In some embodiments, an apparatus for processing a substrate may include a process chamber having a substrate support disposed therein to support a processing surface of a substrate, an injector disposed to a first side of the substrate support and having a first flow path to provide a first process gas and a second flow path to provide a second process gas independent of the first process gas, wherein the injector is positioned to provide the first and second process gases across the processing surface of the substrate, a showerhead disposed above the substrate support to provide the first process gas to the processing surface of the substrate, and an exhaust port disposed to a second side of the substrate support, opposite the injector, to exhaust the first and second process gases from the process chamber.

Phone:

5188430391

VIN:

5NPET46C09H570831

Make:

HYUNDAI

Model:

SONATA

Year:

2009