Richard A Marsh

US Patent:

58883045, Mar 30, 1999

Filed:

Apr 2, 1996

Appl. No.:

8/626789

Inventors:

Salvador P. Umotoy - Antioch CA
Alan F. Morrison - San Jose CA
Karl A. Littau - Palo Alto CA
Richard A. Marsh - Austin TX
Lawrence Chung-Lai Lei - Milpitas CA
Dale DuBois - Los Gatos CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118720

Abstract:

This invention provides a method and apparatus for supporting a wafer in a processing chamber, where the wafer is supported and heated from below via a heater pedestal having a diameter larger than that of the wafer. A process fluid flowing downward toward the top of the wafer is inhibited from depositing near the wafer edge by a shadow ring. The shadow ring, which is placed over but does not contact the wafer, physically masks an annular strip of the wafer near its edge. The shadow ring inhibits deposition of process fluides on the wafer in two distinct ways. First, the shadow ring physically obstructs process gas, flowing downward from above the wafer, from depositing on the masked portion of the wafer. Second, the shadow ring is used to direct a flow of a purge gas to inhibit process gas from seeping under the shadow ring and depositing near the wafer edge. A purge gas manifold is defined by a cylindrical annulus located concentrically below the shadow ring and circumscribing the heater pedestal.

US Patent:

46384022, Jan 20, 1987

Filed:

May 7, 1985

Appl. No.:

6/731852

Inventors:

Basilio Y. Lim - Santa Fe Springs CA
Richard N. Marsh - Livermore CA

International Classification:

H01G 438
H01G 700

US Classification:

361328

Abstract:

The present invention is a multi-section capacitor which includes a plurality of capacitor sections. Each of the plurality of capacitor sections has a right end and a left end and is wound from a length of a first metallized dielectric film having disposed on its near surface a first thin metallized layer which extends to its right edge but terminates short of its left edge leaving a non-metallized strip therealong in combination with a length of a second metallized dielectric film having disposed on its near surface a second thin metallized layer which extends to its left edge but terminates short of its right edge leaving a non-metallized strip therealong so that the first and second thin metallized layers are separated by dielectric film. A portion of the first thin metallized layer is removed at a region intermediate the ends of the length for a distance sufficient to encircle the capacitor section at least once. A first electrical contact and a second electrical contact make electrical contacts with the first and second thin metallized layers, respectively, of each of the plurality of capacitor sections.

US Patent:

48280828, May 9, 1989

Filed:

Feb 19, 1988

Appl. No.:

7/158187

Inventors:

Gary J. Brand - Irvine CA
David C. Poirier - Troy MI
Peter Jarzyna - Livonia MI
John C. Haraf - Livonia MI
Joseph M. Tolkacz - Warren MI
Robert C. Simon - Novi MI
Dale L. Phillips - Dearborn MI
Richard C. Mamolen - Brighton MI
George T. Stephens - Livonia MI
Richard A. Marsh - Birmingham MI

Assignee:

General Motors Corporation - Detroit MI

International Classification:

F16D 3900
F16D 43284
F16H 4502

US Classification:

192 33

Abstract:

Potentially damaging operation of a viscous converter clutch (VCC) is detected in relation to the slippage thereacross. The slippage is compared with a reference slip value indicative of excessive VCC slippage to develop a net overslip indicator. The value of the net overslip indicator changes in the direction of a first limit value so long as the detected slip is at least as great as the reference slip, and in the direction of a second limit value so long as the detected slip is less than the reference slip. When the net overslip indicator reaches the first limit value, the friction clutch is disengaged to release the VCC. According to a first embodiment, the transmission fluid temperature at the time of such deactivation is measured and stored, and the VCC is reactivated when transmission fluid temperature falls below the stored temperature, assuming other criteria for activation are also met. According to a second embodiment, the VCC is reactivated a predetermined time after its deactivation and measurement of the transmission fluid temperature is not required.

US Patent:

61767166, Jan 23, 2001

Filed:

Sep 24, 1999

Appl. No.:

9/405727

Inventors:

Gregory A. Mercurio - Vacaville CA
Richard N. Marsh - Cool CA
Demian T. Martin - Oakland CA

Assignee:

Monster Cable Products, Inc. - Brisbane CA

International Classification:

H01R 2900

US Classification:

439166

Abstract:

An interchangeable electrical connector includes a connector body and an adapter body. The connector body includes electrical contact means, such as a banana plug tip, for engaging an electrical terminal. The connector body includes a conical portion and a threaded portion which is coaxial with the conical portion. The adapter body includes a conical portion which is shaped for co-operative engagement with the conical portion of the connector body, and a threaded portion which is coaxial to the conical portion of the adapter body. The threaded portion of the adapter body is for cooperative engagement with the threaded portion of the connector body, such that cooperative rotation of the connector body relative to the adapter body draws the conical portion of the connector body into engagement with the conical portion of the adapter body. The wedging action of the two conical portions frictionally engages the connector body to the adapter body.

US Patent:

6129568, Oct 10, 2000

Filed:

Jul 11, 1997

Appl. No.:

8/890695

Inventors:

Gregory A. Mercurio - Vacaville CA
Richard N. Marsh - Cool CA
Demian T. Martin - Pacifica CA

Assignee:

Monster Cable Products, Inc. - Brisbane CA

International Classification:

H01R 2900

US Classification:

439166

Abstract:

An interchangeable electrical connector includes a connector body and an adapter body. The connector body includes electrical contact means, such as a banana plug tip, for engaging an electrical terminal. The connector body includes a conical portion and a threaded portion which is coaxial with the conical portion. The adapter body includes a conical portion which is shaped for co-operative engagement with the conical portion of the connector body, and a threaded portion which is coaxial to the conical portion of the adapter body. The threaded portion of the adapter body is for cooperative engagement with the threaded portion of the connector body, such that cooperative rotation of the connector body relative to the adapter body draws the conical portion of the connector body into engagement with the conical portion of the adapter body. The wedging action of the two conical portions frictionally engages the connector body to the adapter body.

US Patent:

20230039721, Feb 9, 2023

Filed:

Oct 5, 2022

Appl. No.:

17/960576

Inventors:

- Fremont CA, US
Richard A. MARSH - San Ramon CA, US
Alexander Miller PATERSON - San Jose CA, US
John HOLLAND - San Jose CA, US

International Classification:

H01J 37/32

Abstract:

In one embodiment, a plasma processing device may include a dielectric window, a vacuum chamber, an energy source, and at least one air amplifier. The dielectric window may include a plasma exposed surface and an air exposed surface. The vacuum chamber and the plasma exposed surface of the dielectric window can cooperate to enclose a plasma processing gas. The energy source can transmit electromagnetic energy through the dielectric window and form an elevated temperature region in the dielectric window. The at least one air amplifier can be in fluid communication with the dielectric window. The at least one air amplifier can operate at a back pressure of at least about 1 in-HO and can provide at least about 30 cfm of air.

US Patent:

20210050188, Feb 18, 2021

Filed:

Oct 29, 2020

Appl. No.:

17/084103

Inventors:

- Fremont CA, US
Richard A. MARSH - San Ramon CA, US
Alexander Miller PATERSON - San Jose CA, US
John HOLLAND - San Jose CA, US

International Classification:

H01J 37/32

Abstract:

In one embodiment, a plasma processing device may include a dielectric window, a vacuum chamber, an energy source, and at least one air amplifier. The dielectric window may include a plasma exposed surface and an air exposed surface. The vacuum chamber and the plasma exposed surface of the dielectric window can cooperate to enclose a plasma processing gas. The energy source can transmit electromagnetic energy through the dielectric window and form an elevated temperature region in the dielectric window. The at least one air amplifier can be in fluid communication with the dielectric window. The at least one air amplifier can operate at a back pressure of at least about 1 in-HO and can provide at least about 30 cfm of air.

US Patent:

20190148118, May 16, 2019

Filed:

Nov 15, 2017

Appl. No.:

15/814139

Inventors:

- Fremont CA, US
Richard MARSH - San Ramon CA, US
Alexander PATERSON - San Jose CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01J 37/32
H01L 21/67
F25D 1/00

Abstract:

A substrate processing system includes a multi-zone cooling apparatus to provide cooling for all or substantially all of a window in a substrate processing chamber. In one aspect, the apparatus includes one or more plenums to cover all or substantially all of a window in a substrate processing chamber, including under an energy source for transformer coupled plasma in the substrate processing chamber. One or more air amplifiers and accompanying conduits provide air to the one or more plenums to provide air flow to the window. The conduits are connected to plenum inlets at various distances from the center, to direct airflow throughout the window and thus address center hot, middle hot, and edge hot conditions, depending on the processes being carried out in the chamber. In one aspect, the one or more plenums include a central air inlet, to direct air toward the center portion of the window, to address center hot conditions.

Address:

2242 Barbara Way, Upland, CA 91784

Phone:

9096080313

VIN:

1G1ZE5E76AF302167

Make:

CHEVROLET

Model:

MALIBU

Year:

2010