Richard Albert Mccullough

US Patent:

7637009, Dec 29, 2009

Filed:

Feb 26, 2007

Appl. No.:

11/711578

Inventors:

Keith Heinemann - Mesa AZ, US
Jamin Ling - Scottsdale AZ, US
Richard McCullough - Chandler AZ, US
Brian McHugh - Phoenix AZ, US
Jordan Lane Wahl - Mesa AZ, US

Assignee:

SV Probe Pte. Ltd. - Singapore

International Classification:

H01R 43/16

US Classification:

29874, 29831, 29884, 324754

Abstract:

An approach is provided for fabricating probe elements for probe card assemblies. Embodiments of the invention include using a reusable substrate, a reusable substrate with layered probe elements and a reusable substrate with a passive layer made of a material that does not adhere well to probe elements formed thereon. Examples of probe elements include, without limitation, a cantilever probe element, a vertically-oriented probe element, and portions of probe elements, e. g. , a beam element of a cantilever probe element. Probe elements, or portions of probe elements, may be formed using any of a number of electroforming or plating processes such as, for example, plating using masking techniques, e. g. , using lithographic techniques such as photolithography, stereolithography, X-ray lithography, etc.