Richard Blane Sims

US Patent:

6884066, Apr 26, 2005

Filed:

Aug 1, 2003

Appl. No.:

10/633124

Inventors:

Vuong P. Nguyen - Allen TX, US
Richard E. Sims - DeSoto TX, US
Xiaoguang Zhu - Plano TX, US

Assignee:

FSI International, Inc. - Chaska MN

International Classification:

F27D001/18

US Classification:

432250, 432253, 118728, 219457

Abstract:

Methods and apparatuses to improve the temperature uniformity of a workpiece being processed on a heated platen of a thermal processing station. A heated platen is enclosed in a housing incorporating an additional heat source that uniformly outputs thermal energy into the process chamber in which the heated platen is positioned. In preferred embodiments, this heat source is positioned in the lid of the housing. It is additionally preferred that the heated lid includes features that provide a gas flow path to introduce to and/or purge gas from the process chamber. In terms of photoresist performance, the improved thermal uniformity provided by using such an additional heat source in the housing, e. g. , in the lid, offers improved line width control and line uniformity across a wafer.

Address:

7023 Hunters Rdg Dr, Dallas, TX 75248

VIN:

JNKAY01E58M603357

Make:

INFINITI

Model:

M35

Year:

2008

Address:

4547 Cedar Path Dr, Dallas, TX 75211

VIN:

4T1BE46K37U597217

Make:

TOYOTA

Model:

CAMRY

Year:

2007